JPS6166942U - - Google Patents
Info
- Publication number
- JPS6166942U JPS6166942U JP15151184U JP15151184U JPS6166942U JP S6166942 U JPS6166942 U JP S6166942U JP 15151184 U JP15151184 U JP 15151184U JP 15151184 U JP15151184 U JP 15151184U JP S6166942 U JPS6166942 U JP S6166942U
- Authority
- JP
- Japan
- Prior art keywords
- pantograph
- longitudinal drive
- cassettes
- drive mechanism
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 claims 2
- 230000003028 elevating effect Effects 0.000 claims 1
- 230000004048 modification Effects 0.000 claims 1
- 238000012986 modification Methods 0.000 claims 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図はこの考案の一実施例を示す斜視図、第
２図はそのチヤツクの前後駆動機構部分を示す側
面図、第３図は同じくチヤツクの前後駆動機構部
分を示す平面図、第４図はそのパンタグラフの一
部を示す斜視図、第５図は従来の半導体ウエハカ
セツト搬送装置を示す斜視図、第６図はそのチヤ
ツクの前後駆動機構部分を示す側面図である。
図において、１は半導体ウエハカセツト、２は
チヤツク、３はチヤツク開閉機構、４は前後駆動
装置、４ｃはリンク、４ｄはシリンダ、４ｅ〜４
ｈは軸、４ｋ，３ａはガイド穴、５は移動台車、
６はリニアガイド、７はケース、８は搬入用ポー
ト、９は搬出用ポートである。尚、図中同一符号
は同一又は相当部分を示す。
Fig. 1 is a perspective view showing an embodiment of this invention, Fig. 2 is a side view showing the longitudinal drive mechanism of the chuck, Fig. 3 is a plan view showing the longitudinal drive mechanism of the chuck, and Fig. 4. 5 is a perspective view showing a part of the pantograph, FIG. 5 is a perspective view showing a conventional semiconductor wafer cassette transfer device, and FIG. 6 is a side view showing the back and forth drive mechanism of the chuck. In the figure, 1 is a semiconductor wafer cassette, 2 is a chuck, 3 is a chuck opening/closing mechanism, 4 is a longitudinal drive device, 4c is a link, 4d is a cylinder, 4e to 4
h is the shaft, 4k, 3a are the guide holes, 5 is the moving trolley,
6 is a linear guide, 7 is a case, 8 is a port for carrying in, and 9 is a port for carrying out. Note that the same reference numerals in the figures indicate the same or corresponding parts.
Claims (1)
に複数個搬送するため、カセツトを掴むチヤツク
の開閉機構、前後駆動機構、昇降機構及び走行機
構を有するカセツト搬送装置において、上記前後
駆動機構にパンタグラフとパンタグラフの変形駆
動装置とを用いたことを特徴とする半導体ウエハ
カセツト搬送装置。 In order to transport a plurality of cassettes containing semiconductor wafers at the same time, the cassette transporting device has a chuck opening/closing mechanism for gripping the cassettes, a longitudinal drive mechanism, an elevating mechanism, and a traveling mechanism.The longitudinal drive mechanism has a pantograph and a pantograph modification. A semiconductor wafer cassette transport device characterized by using a drive device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151184U JPS6166942U (en) | 1984-10-05 | 1984-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15151184U JPS6166942U (en) | 1984-10-05 | 1984-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6166942U true JPS6166942U (en) | 1986-05-08 |
Family
ID=30709621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15151184U Pending JPS6166942U (en) | 1984-10-05 | 1984-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6166942U (en) |
-
1984
- 1984-10-05 JP JP15151184U patent/JPS6166942U/ja active Pending
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