JPS61196537U - - Google Patents
Info
- Publication number
- JPS61196537U JPS61196537U JP8192185U JP8192185U JPS61196537U JP S61196537 U JPS61196537 U JP S61196537U JP 8192185 U JP8192185 U JP 8192185U JP 8192185 U JP8192185 U JP 8192185U JP S61196537 U JPS61196537 U JP S61196537U
- Authority
- JP
- Japan
- Prior art keywords
- storage
- loading
- guide rail
- cassettes
- unloading station
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 5
- 230000002265 prevention Effects 0.000 claims 1
Landscapes
- Packaging Frangible Articles (AREA)
- Warehouses Or Storage Devices (AREA)
- Intermediate Stations On Conveyors (AREA)
Description
第１図及び第２図はこの考案による半導体ウエ
ーハカセツトの収納搬送装置の一実施例を示す正
面図及び斜視図、第３図は従来の半導体ウエーハ
カセツトの収納搬送装置の概要斜視図である。
３…カセツト、１１…搬出入ステーシヨン、１
２…搬入ポート、１３…搬出ポート、１４…収納
庫、１８…移送機、２１…搬送機、２２…案内レ
ール、２３…固定チエーン、２５，２７…駆動用
鎖車、２８…近接検出センサ、３０…ウエーハ処
理装置。なお、図中同一符号は同一又は相当部分
を示す。
1 and 2 are front and perspective views showing an embodiment of a semiconductor wafer cassette storage and transportation device according to the invention, and FIG. 3 is a schematic perspective view of a conventional semiconductor wafer cassette storage and transportation device. 3...cassette, 11...loading/unloading station, 1
2... Carrying in port, 13... Carrying out port, 14... Storage, 18... Transfer machine, 21... Conveying machine, 22... Guide rail, 23... Fixed chain, 25, 27... Drive chain wheel, 28... Proximity detection sensor, 30...Wafer processing equipment. Note that the same reference numerals in the figures indicate the same or equivalent parts.
Claims (1)
配設された搬出入ステーシヨン、この搬出入ステ
ーシヨンに隣接して配設され、半導体ウエーハを
収容したカセツトを収納するための多数の受棚が
設けられた収納庫、上記搬出入ステーシヨンと上
記収納庫に続いて配設されたウエーハ処理装置と
にわたつて前記に配設された案内レール、この案
内レールの上方に平行に張られた固定チエーン、
上記案内レール上に配置され、上記固定チエーン
に係合する駆動用鎖車を回転駆動させ走行され、
上記搬入、搬出のポートと上記収納庫間に上記カ
セツトを移送する移送機、及び上記案内レール上
に配置され、上記固定チエーンに係合する駆動用
鎖車を回転駆動させ走行され、上記収納庫側と上
記ウエーハ処理装置間に上記カセツトを搬送する
搬送機を備えた半導体ウエーハカセツトの収納搬
送装置。 (2) 移送機と搬送機間に衝突防止用の近接検出
センサを設けた実用新案登録請求の範囲第１項記
載の半導体ウエーハカセツトの収納搬送装置。[Scope of Claim for Utility Model Registration] (1) A loading/unloading station in which a loading port and an unloading port are arranged side by side at the top, and a loading/unloading station arranged adjacent to this loading/unloading station to house cassettes containing semiconductor wafers. a storage shed with a large number of receiving shelves for storage; a guide rail disposed above the loading/unloading station and a wafer processing device disposed next to the storage; above the guide rail; fixed chains stretched in parallel,
The driving chain wheel disposed on the guide rail and engaged with the fixed chain is driven to rotate,
A transfer machine that transfers the cassettes between the loading and unloading ports and the storage, and a driving chain wheel disposed on the guide rail and engaged with the fixed chain, which is driven to rotate, and the storage A storage and transportation device for semiconductor wafer cassettes, comprising a transportation device for transporting the cassettes between the side and the wafer processing device. (2) A semiconductor wafer cassette storage and conveyance device according to claim 1, which is provided with a proximity detection sensor for collision prevention between the transfer machine and the conveyance machine.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8192185U JPS61196537U (en) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8192185U JPS61196537U (en) | 1985-05-29 | 1985-05-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61196537U true JPS61196537U (en) | 1986-12-08 |
Family
ID=30629163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8192185U Pending JPS61196537U (en) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61196537U (en) |
-
1985
- 1985-05-29 JP JP8192185U patent/JPS61196537U/ja active Pending
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