JPS62133546U - - Google Patents
Info
- Publication number
- JPS62133546U JPS62133546U JP2115886U JP2115886U JPS62133546U JP S62133546 U JPS62133546 U JP S62133546U JP 2115886 U JP2115886 U JP 2115886U JP 2115886 U JP2115886 U JP 2115886U JP S62133546 U JPS62133546 U JP S62133546U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- substrates
- transported
- taken out
- state
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims 9
Landscapes
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Description
第１図は本考案の実施例による装置の平面図で
ある。第２図ａ、第２図ｂは搬送システムの作動
を示すための第１図の側面図である。
〔主要部分の符号の説明〕、１〜３……カセツ
ト台、４……プリアライメントステージ、５〜１
４……搬送ベルト、１５……制御部、３１〜３８
……ウエハセンサ、４１〜４３，４５〜４７……
カセツト、Ｍ１〜Ｍ６……モータ。
FIG. 1 is a plan view of an apparatus according to an embodiment of the present invention. Figures 2a and 2b are side views of Figure 1 to illustrate the operation of the conveying system. [Explanation of symbols of main parts], 1-3...Cassette stand, 4...Pre-alignment stage, 5-1
4...Transport belt, 15...Control unit, 31-38
...Wafer sensor, 41-43, 45-47...
Cassette, M1 to M6...Motor.
Claims (1)
一枚ずつ前記基板を取り出して、所定の処理装置
に搬送するとともに処理済みの基板を前記処理装
置からアンロード用の空カセツトに搬送する装置
において、 前記基板が収納された少なくとも２つのロード
用のカセツトと、１つの空カセツトを夫々載置す
る複数のカセツト台と； 該カセツト台の夫々と前記処理装置との間で相
互に前記基板を搬送するための搬送路と； 前記ロード用の一方のカセツトから前記基板を
取り出し、前記アンロード用カセツトに搬送する
第１の状態と、前記ロード用の他方のカセツトか
ら前記基板を取り出し、前記第１の状態において
空になつた前記ロード用の一方のカセツトに搬送
する第１の状態との、少なくとも２状態に前記搬
送路を切り換える制御手段とを備えたことを特徴
とする基板搬送装置。[Claims for Utility Model Registration] The substrates are taken out one by one from a loading cassette containing a plurality of substrates and transported to a predetermined processing device, and the processed substrates are transferred from the processing device to an empty space for unloading. In a device for transporting substrates to cassettes, at least two loading cassettes containing the substrates, a plurality of cassette stands on which one empty cassette is placed, and between each of the cassette stands and the processing device. a transport path for mutually transporting the substrate; a first state in which the substrate is taken out from one of the loading cassettes and transported to the unloading cassette; and a first state in which the substrate is taken out from the one loading cassette and transported to the unloading cassette; and a control means for switching the conveying path to at least two states: a first state in which the cassette is taken out and transported to one of the empty load cassettes in the first state. Substrate transport device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986021158U JPH0423858Y2 (en) | 1986-02-17 | 1986-02-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986021158U JPH0423858Y2 (en) | 1986-02-17 | 1986-02-17 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62133546U true JPS62133546U (en) | 1987-08-22 |
| JPH0423858Y2 JPH0423858Y2 (en) | 1992-06-04 |
Family
ID=30817344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986021158U Expired JPH0423858Y2 (en) | 1986-02-17 | 1986-02-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0423858Y2 (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52156552A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Wafer inspection apparatus |
| JPS5986143A (en) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | Automatic wafer exchange device |
-
1986
- 1986-02-17 JP JP1986021158U patent/JPH0423858Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52156552A (en) * | 1976-06-23 | 1977-12-27 | Hitachi Ltd | Wafer inspection apparatus |
| JPS5986143A (en) * | 1982-11-09 | 1984-05-18 | Ulvac Corp | Automatic wafer exchange device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0423858Y2 (en) | 1992-06-04 |
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