JPS52156552A - Wafer inspection apparatus - Google Patents
Wafer inspection apparatusInfo
- Publication number
- JPS52156552A JPS52156552A JP7318176A JP7318176A JPS52156552A JP S52156552 A JPS52156552 A JP S52156552A JP 7318176 A JP7318176 A JP 7318176A JP 7318176 A JP7318176 A JP 7318176A JP S52156552 A JPS52156552 A JP S52156552A
- Authority
- JP
- Japan
- Prior art keywords
- wafer inspection
- inspection apparatus
- sheet
- workability
- unloading
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To improve the workability of wafer inspection by automatically performing loading and unloading of semiconductor wafers sheet by sheet.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318176A JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7318176A JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP856784A Division JPS59139642A (en) | 1984-01-23 | 1984-01-23 | Inspecting device for wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52156552A true JPS52156552A (en) | 1977-12-27 |
| JPS6118337B2 JPS6118337B2 (en) | 1986-05-12 |
Family
ID=13510703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7318176A Granted JPS52156552A (en) | 1976-06-23 | 1976-06-23 | Wafer inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52156552A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757104A (en) * | 1980-09-24 | 1982-04-06 | Hitachi Ltd | Plate-shaped work automatic feeding holding equipment |
| JPS59188652A (en) * | 1983-02-28 | 1984-10-26 | タマラツク・サイエンテイフイツク・カンパニ−・インコ−ポレ−テツド | Automatic system for exposing and processing double side printed circuit panel |
| JPS62133546U (en) * | 1986-02-17 | 1987-08-22 |
-
1976
- 1976-06-23 JP JP7318176A patent/JPS52156552A/en active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5757104A (en) * | 1980-09-24 | 1982-04-06 | Hitachi Ltd | Plate-shaped work automatic feeding holding equipment |
| JPS59188652A (en) * | 1983-02-28 | 1984-10-26 | タマラツク・サイエンテイフイツク・カンパニ−・インコ−ポレ−テツド | Automatic system for exposing and processing double side printed circuit panel |
| JPS62133546U (en) * | 1986-02-17 | 1987-08-22 | ||
| JPH0423858Y2 (en) * | 1986-02-17 | 1992-06-04 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6118337B2 (en) | 1986-05-12 |
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