JPS51132762A - Heat-treatment method of semiconductor device - Google Patents
Heat-treatment method of semiconductor deviceInfo
- Publication number
- JPS51132762A JPS51132762A JP5766275A JP5766275A JPS51132762A JP S51132762 A JPS51132762 A JP S51132762A JP 5766275 A JP5766275 A JP 5766275A JP 5766275 A JP5766275 A JP 5766275A JP S51132762 A JPS51132762 A JP S51132762A
- Authority
- JP
- Japan
- Prior art keywords
- heat
- semiconductor device
- treatment method
- wafer
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: In order to obtain a diffusion layer by means of rotating the wafer, in a diffusion method which uses solid-impurities.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5766275A JPS51132762A (en) | 1975-05-13 | 1975-05-13 | Heat-treatment method of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5766275A JPS51132762A (en) | 1975-05-13 | 1975-05-13 | Heat-treatment method of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51132762A true JPS51132762A (en) | 1976-11-18 |
Family
ID=13062101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5766275A Pending JPS51132762A (en) | 1975-05-13 | 1975-05-13 | Heat-treatment method of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51132762A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57138130A (en) * | 1981-02-20 | 1982-08-26 | Fujitsu Ltd | Diffusion treatment method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834670A (en) * | 1971-09-07 | 1973-05-21 |
-
1975
- 1975-05-13 JP JP5766275A patent/JPS51132762A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4834670A (en) * | 1971-09-07 | 1973-05-21 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57138130A (en) * | 1981-02-20 | 1982-08-26 | Fujitsu Ltd | Diffusion treatment method |
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