JPS5230167A - Method for production of semiconductor device - Google Patents

Method for production of semiconductor device

Info

Publication number
JPS5230167A
JPS5230167A JP10593175A JP10593175A JPS5230167A JP S5230167 A JPS5230167 A JP S5230167A JP 10593175 A JP10593175 A JP 10593175A JP 10593175 A JP10593175 A JP 10593175A JP S5230167 A JPS5230167 A JP S5230167A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
film
devices
various kinds
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10593175A
Other languages
Japanese (ja)
Inventor
Tatsu Ito
Kohei Yamada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP10593175A priority Critical patent/JPS5230167A/en
Publication of JPS5230167A publication Critical patent/JPS5230167A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: A method for production of semiconductor device applicable as passivation film for various kinds of the devices while keeping characteristics of glassivation film.
COPYRIGHT: (C)1977,JPO&Japio
JP10593175A 1975-09-03 1975-09-03 Method for production of semiconductor device Pending JPS5230167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10593175A JPS5230167A (en) 1975-09-03 1975-09-03 Method for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10593175A JPS5230167A (en) 1975-09-03 1975-09-03 Method for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5230167A true JPS5230167A (en) 1977-03-07

Family

ID=14420587

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10593175A Pending JPS5230167A (en) 1975-09-03 1975-09-03 Method for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5230167A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116203U (en) * 1979-02-09 1980-08-16
JPS5632729A (en) * 1979-08-23 1981-04-02 Sanyo Electric Co Ltd Etching method
JPS5640255A (en) * 1979-09-08 1981-04-16 Toshiba Corp Manufacture of bipolar type integrated circuit
JPS5678125A (en) * 1979-11-30 1981-06-26 Hitachi Ltd Manufacture of semiconductor device
JPS57120341A (en) * 1981-01-17 1982-07-27 Toshiba Corp Glass passivation semiconductor device
JPS5968932A (en) * 1982-10-13 1984-04-19 Internatl Rectifier Corp Japan Ltd Manufacture of semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105466A (en) * 1973-02-07 1974-10-05

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49105466A (en) * 1973-02-07 1974-10-05

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55116203U (en) * 1979-02-09 1980-08-16
JPS5632729A (en) * 1979-08-23 1981-04-02 Sanyo Electric Co Ltd Etching method
JPS5640255A (en) * 1979-09-08 1981-04-16 Toshiba Corp Manufacture of bipolar type integrated circuit
JPS5678125A (en) * 1979-11-30 1981-06-26 Hitachi Ltd Manufacture of semiconductor device
JPS57120341A (en) * 1981-01-17 1982-07-27 Toshiba Corp Glass passivation semiconductor device
JPS6322456B2 (en) * 1981-01-17 1988-05-12 Tokyo Shibaura Electric Co
JPS5968932A (en) * 1982-10-13 1984-04-19 Internatl Rectifier Corp Japan Ltd Manufacture of semiconductor device

Similar Documents

Publication Publication Date Title
JPS5224478A (en) Semiconductor device manufacturing process
JPS5240071A (en) Semiconductor device
JPS5230167A (en) Method for production of semiconductor device
JPS5255871A (en) Production of semiconductor
JPS51113478A (en) The manufacturing method of semiconductor device
JPS51140572A (en) Semiconductor device
JPS524175A (en) Groups iii-v compounds semiconductor device
JPS51130176A (en) Semiconductor device process
JPS51122375A (en) Semiconductor device
JPS5245275A (en) Mis type semiconductor device
JPS5258370A (en) Semiconductor device
JPS51112292A (en) Semiconductor device
JPS51117887A (en) Semiconductor ic device
JPS5372567A (en) Semiconductor device
JPS51135367A (en) Semiconductor device
JPS51140571A (en) Method for forming a semiconductor protective film
JPS5219071A (en) Production method of semiconductor device
JPS5270753A (en) Wafer for semiconductor device
JPS5230383A (en) Semiconductor device
JPS51132762A (en) Heat-treatment method of semiconductor device
JPS51113469A (en) Manufacturing method of semiconductor device
JPS51151071A (en) Manufacturing method of a semiconductor apparatus
JPS51132980A (en) Semiconductor device
JPS5211867A (en) Manufacturing method of a semiconductor device
JPS51135473A (en) Surface treatment agent of semi- conductor elements