JPS5261956A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261956A
JPS5261956A JP13886375A JP13886375A JPS5261956A JP S5261956 A JPS5261956 A JP S5261956A JP 13886375 A JP13886375 A JP 13886375A JP 13886375 A JP13886375 A JP 13886375A JP S5261956 A JPS5261956 A JP S5261956A
Authority
JP
Japan
Prior art keywords
production
semiconductor
wafers
prevent curving
curving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13886375A
Other languages
Japanese (ja)
Inventor
Takashi Yahano
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13886375A priority Critical patent/JPS5261956A/en
Publication of JPS5261956A publication Critical patent/JPS5261956A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent curving of wafers in production process.
COPYRIGHT: (C)1977,JPO&Japio
JP13886375A 1975-11-18 1975-11-18 Production of semiconductor device Pending JPS5261956A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13886375A JPS5261956A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13886375A JPS5261956A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5261956A true JPS5261956A (en) 1977-05-21

Family

ID=15231884

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13886375A Pending JPS5261956A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5261956A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170539A (en) * 1981-04-13 1982-10-20 Fujitsu Ltd Manufacture of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57170539A (en) * 1981-04-13 1982-10-20 Fujitsu Ltd Manufacture of semiconductor device

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