JPS51132778A - Inspection method of semiconductor apparatus - Google Patents

Inspection method of semiconductor apparatus

Info

Publication number
JPS51132778A
JPS51132778A JP5610875A JP5610875A JPS51132778A JP S51132778 A JPS51132778 A JP S51132778A JP 5610875 A JP5610875 A JP 5610875A JP 5610875 A JP5610875 A JP 5610875A JP S51132778 A JPS51132778 A JP S51132778A
Authority
JP
Japan
Prior art keywords
inspection method
semiconductor apparatus
semiconductors
examine
products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5610875A
Other languages
Japanese (ja)
Inventor
Mitsuo Ito
Kanae Murao
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP5610875A priority Critical patent/JPS51132778A/en
Publication of JPS51132778A publication Critical patent/JPS51132778A/en
Pending legal-status Critical Current

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Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To be able to examine the temperature of semiconductors in short time without giving bad influence on the products to be detected.
COPYRIGHT: (C)1976,JPO&Japio
JP5610875A 1975-05-14 1975-05-14 Inspection method of semiconductor apparatus Pending JPS51132778A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5610875A JPS51132778A (en) 1975-05-14 1975-05-14 Inspection method of semiconductor apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5610875A JPS51132778A (en) 1975-05-14 1975-05-14 Inspection method of semiconductor apparatus

Publications (1)

Publication Number Publication Date
JPS51132778A true JPS51132778A (en) 1976-11-18

Family

ID=13017889

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5610875A Pending JPS51132778A (en) 1975-05-14 1975-05-14 Inspection method of semiconductor apparatus

Country Status (1)

Country Link
JP (1) JPS51132778A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS626184A (en) * 1985-04-24 1987-01-13 アウシモント・ソチエタ・ペル・アツィオニ Perfluoropolyether used as fluid for test in electronic field

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS626184A (en) * 1985-04-24 1987-01-13 アウシモント・ソチエタ・ペル・アツィオニ Perfluoropolyether used as fluid for test in electronic field
JPH0713236B2 (en) * 1985-04-24 1995-02-15 アウシモント・ソチエタ・ペル・アツィオニ Perfluoropolyether used as a test fluid in the electronic field

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