JPS5216178A - Airtightness testing device - Google Patents
Airtightness testing deviceInfo
- Publication number
- JPS5216178A JPS5216178A JP9230075A JP9230075A JPS5216178A JP S5216178 A JPS5216178 A JP S5216178A JP 9230075 A JP9230075 A JP 9230075A JP 9230075 A JP9230075 A JP 9230075A JP S5216178 A JPS5216178 A JP S5216178A
- Authority
- JP
- Japan
- Prior art keywords
- testing device
- airtightness testing
- airtightness
- optically
- electrically
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
PURPOSE: To test airtightness of the semiconductor device by detecting air bubbles optically and electrically.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9230075A JPS5216178A (en) | 1975-07-28 | 1975-07-28 | Airtightness testing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9230075A JPS5216178A (en) | 1975-07-28 | 1975-07-28 | Airtightness testing device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5216178A true JPS5216178A (en) | 1977-02-07 |
Family
ID=14050549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9230075A Pending JPS5216178A (en) | 1975-07-28 | 1975-07-28 | Airtightness testing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5216178A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5754832A (en) * | 1980-09-19 | 1982-04-01 | Hitachi Ltd | Airtight inspection |
JPS57173544A (en) * | 1981-04-17 | 1982-10-25 | Susumu Ariga | Fuel controller of carburetor |
JPS582630A (en) * | 1981-06-29 | 1983-01-08 | Taikoushiya:Kk | Leakage checking device |
JPS5853666A (en) * | 1981-09-25 | 1983-03-30 | Japan Electronic Control Syst Co Ltd | Controller for electronic control carbureter |
JPS5858826U (en) * | 1981-10-14 | 1983-04-21 | 株式会社東芝 | Aggregate structure of cylindrical equipment |
JPS5954936A (en) * | 1982-09-22 | 1984-03-29 | Sanshu Press Kogyo Kk | Bubble detector |
US4924694A (en) * | 1988-08-22 | 1990-05-15 | Expertek, Inc. | Apparatus for leak testing a fluid containing chamber |
US5054311A (en) * | 1989-12-11 | 1991-10-08 | Expertek, Inc. | Fully automated leak testing apparatus |
-
1975
- 1975-07-28 JP JP9230075A patent/JPS5216178A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5754832A (en) * | 1980-09-19 | 1982-04-01 | Hitachi Ltd | Airtight inspection |
JPS57173544A (en) * | 1981-04-17 | 1982-10-25 | Susumu Ariga | Fuel controller of carburetor |
JPS6337255B2 (en) * | 1981-04-17 | 1988-07-25 | Susumu Ariga | |
JPS582630A (en) * | 1981-06-29 | 1983-01-08 | Taikoushiya:Kk | Leakage checking device |
JPS5853666A (en) * | 1981-09-25 | 1983-03-30 | Japan Electronic Control Syst Co Ltd | Controller for electronic control carbureter |
JPS5858826U (en) * | 1981-10-14 | 1983-04-21 | 株式会社東芝 | Aggregate structure of cylindrical equipment |
JPS5954936A (en) * | 1982-09-22 | 1984-03-29 | Sanshu Press Kogyo Kk | Bubble detector |
US4924694A (en) * | 1988-08-22 | 1990-05-15 | Expertek, Inc. | Apparatus for leak testing a fluid containing chamber |
US5054311A (en) * | 1989-12-11 | 1991-10-08 | Expertek, Inc. | Fully automated leak testing apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5233575A (en) | Differential pressure measuring device | |
JPS5216178A (en) | Airtightness testing device | |
JPS51115775A (en) | Semiconductor apparatus | |
JPS51142372A (en) | Time measuring device | |
JPS5241583A (en) | Ion detecting device for mass analyzer | |
JPS5279658A (en) | Semiconductor device | |
JPS5224078A (en) | Ic use measuring device | |
JPS51132086A (en) | Specific characteristics variation testing device | |
JPS51135474A (en) | To analyze a semiconductor device | |
JPS51131002A (en) | Car inspection and examination device | |
JPS5220076A (en) | Dew-point measurement device | |
JPS5216177A (en) | Probe card | |
JPS52101979A (en) | Semiconductor device | |
JPS51147383A (en) | Gas sampling device for an analysis device | |
JPS5219079A (en) | Ic tester | |
JPS5258947A (en) | Measuring device for solids | |
JPS5264280A (en) | Semiconductor device | |
JPS51149738A (en) | Method of testing electeronic computers | |
JPS5255875A (en) | Leak testing method | |
JPS51118996A (en) | Material detector | |
JPS51146260A (en) | Display device | |
JPS53112675A (en) | Discriminator for waveform | |
JPS51140681A (en) | Leakage detection device | |
JPS51124452A (en) | Long material measuring devise | |
JPS5258367A (en) | Formation of contact holes in semiconductor device |