JPS51121267A - Semiconductor wafer measuring device - Google Patents

Semiconductor wafer measuring device

Info

Publication number
JPS51121267A
JPS51121267A JP50046735A JP4673575A JPS51121267A JP S51121267 A JPS51121267 A JP S51121267A JP 50046735 A JP50046735 A JP 50046735A JP 4673575 A JP4673575 A JP 4673575A JP S51121267 A JPS51121267 A JP S51121267A
Authority
JP
Japan
Prior art keywords
measuring device
semiconductor wafer
wafer measuring
elements
arising
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP50046735A
Other languages
Japanese (ja)
Inventor
Michio Asahina
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP50046735A priority Critical patent/JPS51121267A/en
Publication of JPS51121267A publication Critical patent/JPS51121267A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To provide a measuring device that eliminates damages from arising when making electrical measurements of semiconductor elements and thus improve the reliability of the elements.
COPYRIGHT: (C)1976,JPO&Japio
JP50046735A 1975-04-17 1975-04-17 Semiconductor wafer measuring device Pending JPS51121267A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50046735A JPS51121267A (en) 1975-04-17 1975-04-17 Semiconductor wafer measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50046735A JPS51121267A (en) 1975-04-17 1975-04-17 Semiconductor wafer measuring device

Publications (1)

Publication Number Publication Date
JPS51121267A true JPS51121267A (en) 1976-10-23

Family

ID=12755575

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50046735A Pending JPS51121267A (en) 1975-04-17 1975-04-17 Semiconductor wafer measuring device

Country Status (1)

Country Link
JP (1) JPS51121267A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353769A (en) * 1976-10-27 1978-05-16 Hitachi Ltd Device for inspecting ceramic substrate wiring
JPS54713U (en) * 1977-06-06 1979-01-06
JPS599934A (en) * 1982-07-07 1984-01-19 Nippon Denshi Zairyo Kk Manufacture of probe card
JPH01134270U (en) * 1988-03-09 1989-09-13

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5353769A (en) * 1976-10-27 1978-05-16 Hitachi Ltd Device for inspecting ceramic substrate wiring
JPS5740984B2 (en) * 1976-10-27 1982-08-31
JPS54713U (en) * 1977-06-06 1979-01-06
JPS599934A (en) * 1982-07-07 1984-01-19 Nippon Denshi Zairyo Kk Manufacture of probe card
JPS6222529B2 (en) * 1982-07-07 1987-05-19 Nippon Denshi Zairyo Kk
JPH01134270U (en) * 1988-03-09 1989-09-13

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