JPS52115188A - Prober - Google Patents

Prober

Info

Publication number
JPS52115188A
JPS52115188A JP3121076A JP3121076A JPS52115188A JP S52115188 A JPS52115188 A JP S52115188A JP 3121076 A JP3121076 A JP 3121076A JP 3121076 A JP3121076 A JP 3121076A JP S52115188 A JPS52115188 A JP S52115188A
Authority
JP
Japan
Prior art keywords
prober
lsis
ics
speed
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3121076A
Other languages
Japanese (ja)
Inventor
Masuzo Ikumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3121076A priority Critical patent/JPS52115188A/en
Publication of JPS52115188A publication Critical patent/JPS52115188A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To speed the characteristic measurement to ICs , LSIs, etc. by protruding probes from two directions opposing to more than two electrode pads on the diagonal lines of the elements formed in a semiconductor wafer.
COPYRIGHT: (C)1977,JPO&Japio
JP3121076A 1976-03-24 1976-03-24 Prober Pending JPS52115188A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3121076A JPS52115188A (en) 1976-03-24 1976-03-24 Prober

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3121076A JPS52115188A (en) 1976-03-24 1976-03-24 Prober

Publications (1)

Publication Number Publication Date
JPS52115188A true JPS52115188A (en) 1977-09-27

Family

ID=12325060

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3121076A Pending JPS52115188A (en) 1976-03-24 1976-03-24 Prober

Country Status (1)

Country Link
JP (1) JPS52115188A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167344A (en) * 1984-12-26 1985-08-30 Hitachi Ltd Inspecting device for semiconductor wafer
JPS63140542A (en) * 1986-12-02 1988-06-13 Fujitsu Ltd Probe card

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60167344A (en) * 1984-12-26 1985-08-30 Hitachi Ltd Inspecting device for semiconductor wafer
JPS63140542A (en) * 1986-12-02 1988-06-13 Fujitsu Ltd Probe card

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