JPS53141584A - Measuring instrument of semiconductor device - Google Patents
Measuring instrument of semiconductor deviceInfo
- Publication number
- JPS53141584A JPS53141584A JP5681277A JP5681277A JPS53141584A JP S53141584 A JPS53141584 A JP S53141584A JP 5681277 A JP5681277 A JP 5681277A JP 5681277 A JP5681277 A JP 5681277A JP S53141584 A JPS53141584 A JP S53141584A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- measuring instrument
- chip
- vertex
- probe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE: To measure a plural number of chip characteristics simultaneously by arranging a probe in a radiative direction, within the straight line drawn perpendicularly from any vertex of a rectangular chip to the diagonal line of the chip, being made to face from a pad to the outside.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5681277A JPS53141584A (en) | 1977-05-17 | 1977-05-17 | Measuring instrument of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5681277A JPS53141584A (en) | 1977-05-17 | 1977-05-17 | Measuring instrument of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS53141584A true JPS53141584A (en) | 1978-12-09 |
Family
ID=13037779
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5681277A Pending JPS53141584A (en) | 1977-05-17 | 1977-05-17 | Measuring instrument of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53141584A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5866339A (en) * | 1981-10-16 | 1983-04-20 | Toshiba Corp | Data accumulation method of integrated circuit device |
-
1977
- 1977-05-17 JP JP5681277A patent/JPS53141584A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5866339A (en) * | 1981-10-16 | 1983-04-20 | Toshiba Corp | Data accumulation method of integrated circuit device |
JPH0335829B2 (en) * | 1981-10-16 | 1991-05-29 | Tokyo Shibaura Electric Co |
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