JPS53141584A - Measuring instrument of semiconductor device - Google Patents

Measuring instrument of semiconductor device

Info

Publication number
JPS53141584A
JPS53141584A JP5681277A JP5681277A JPS53141584A JP S53141584 A JPS53141584 A JP S53141584A JP 5681277 A JP5681277 A JP 5681277A JP 5681277 A JP5681277 A JP 5681277A JP S53141584 A JPS53141584 A JP S53141584A
Authority
JP
Japan
Prior art keywords
semiconductor device
measuring instrument
chip
vertex
probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5681277A
Other languages
Japanese (ja)
Inventor
Yukio Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5681277A priority Critical patent/JPS53141584A/en
Publication of JPS53141584A publication Critical patent/JPS53141584A/en
Pending legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: To measure a plural number of chip characteristics simultaneously by arranging a probe in a radiative direction, within the straight line drawn perpendicularly from any vertex of a rectangular chip to the diagonal line of the chip, being made to face from a pad to the outside.
COPYRIGHT: (C)1978,JPO&Japio
JP5681277A 1977-05-17 1977-05-17 Measuring instrument of semiconductor device Pending JPS53141584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5681277A JPS53141584A (en) 1977-05-17 1977-05-17 Measuring instrument of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5681277A JPS53141584A (en) 1977-05-17 1977-05-17 Measuring instrument of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53141584A true JPS53141584A (en) 1978-12-09

Family

ID=13037779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5681277A Pending JPS53141584A (en) 1977-05-17 1977-05-17 Measuring instrument of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53141584A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866339A (en) * 1981-10-16 1983-04-20 Toshiba Corp Data accumulation method of integrated circuit device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5866339A (en) * 1981-10-16 1983-04-20 Toshiba Corp Data accumulation method of integrated circuit device
JPH0335829B2 (en) * 1981-10-16 1991-05-29 Tokyo Shibaura Electric Co

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