JPS5216177A - Probe card - Google Patents

Probe card

Info

Publication number
JPS5216177A
JPS5216177A JP9188475A JP9188475A JPS5216177A JP S5216177 A JPS5216177 A JP S5216177A JP 9188475 A JP9188475 A JP 9188475A JP 9188475 A JP9188475 A JP 9188475A JP S5216177 A JPS5216177 A JP S5216177A
Authority
JP
Japan
Prior art keywords
probe card
ability
high frequency
frequency characteristics
accurate measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9188475A
Other languages
Japanese (ja)
Inventor
Masayuki Sato
Mitsuo Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP9188475A priority Critical patent/JPS5216177A/en
Publication of JPS5216177A publication Critical patent/JPS5216177A/en
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

PURPOSE: The probe card which has ability of accurate measurement of the high frequency characteristics.
COPYRIGHT: (C)1977,JPO&Japio
JP9188475A 1975-07-30 1975-07-30 Probe card Pending JPS5216177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9188475A JPS5216177A (en) 1975-07-30 1975-07-30 Probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9188475A JPS5216177A (en) 1975-07-30 1975-07-30 Probe card

Publications (1)

Publication Number Publication Date
JPS5216177A true JPS5216177A (en) 1977-02-07

Family

ID=14038974

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9188475A Pending JPS5216177A (en) 1975-07-30 1975-07-30 Probe card

Country Status (1)

Country Link
JP (1) JPS5216177A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395770U (en) * 1976-12-30 1978-08-04
JPS584943A (en) * 1981-06-30 1983-01-12 Fujitsu Ltd Low impedance probe card
JPH11148951A (en) * 1997-11-18 1999-06-02 Pfu Ltd Impedance measuring device and its wiring

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5395770U (en) * 1976-12-30 1978-08-04
JPS5729314Y2 (en) * 1976-12-30 1982-06-26
JPS584943A (en) * 1981-06-30 1983-01-12 Fujitsu Ltd Low impedance probe card
JPH0416943B2 (en) * 1981-06-30 1992-03-25 Fujitsu Ltd
JPH11148951A (en) * 1997-11-18 1999-06-02 Pfu Ltd Impedance measuring device and its wiring

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