JPS5387258A - Measuring device - Google Patents
Measuring deviceInfo
- Publication number
- JPS5387258A JPS5387258A JP170377A JP170377A JPS5387258A JP S5387258 A JPS5387258 A JP S5387258A JP 170377 A JP170377 A JP 170377A JP 170377 A JP170377 A JP 170377A JP S5387258 A JPS5387258 A JP S5387258A
- Authority
- JP
- Japan
- Prior art keywords
- measuring device
- exammined
- warpage
- sucking
- examined
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
PURPOSE: To perform surface measurement of the object to be examined such as semiconductor wafer, etc. in a warpage-free state by vacuum-sucking the back surface of the elastically deformable plate form object to be exammined on a stage.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP170377A JPS5387258A (en) | 1977-01-11 | 1977-01-11 | Measuring device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP170377A JPS5387258A (en) | 1977-01-11 | 1977-01-11 | Measuring device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5387258A true JPS5387258A (en) | 1978-08-01 |
Family
ID=11508897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP170377A Pending JPS5387258A (en) | 1977-01-11 | 1977-01-11 | Measuring device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5387258A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6385331A (en) * | 1986-09-29 | 1988-04-15 | Shimadzu Corp | Vacuum sucking apparatus |
JPS63113946U (en) * | 1987-01-19 | 1988-07-22 | ||
WO2020110532A1 (en) * | 2018-11-28 | 2020-06-04 | 三菱電機株式会社 | Thickness measurement device and thickness measurement method |
-
1977
- 1977-01-11 JP JP170377A patent/JPS5387258A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6385331A (en) * | 1986-09-29 | 1988-04-15 | Shimadzu Corp | Vacuum sucking apparatus |
JPS63113946U (en) * | 1987-01-19 | 1988-07-22 | ||
WO2020110532A1 (en) * | 2018-11-28 | 2020-06-04 | 三菱電機株式会社 | Thickness measurement device and thickness measurement method |
JPWO2020110532A1 (en) * | 2018-11-28 | 2021-06-03 | 三菱電機株式会社 | Thickness measuring device and thickness measuring method |
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