JPS5387258A - Measuring device - Google Patents

Measuring device

Info

Publication number
JPS5387258A
JPS5387258A JP170377A JP170377A JPS5387258A JP S5387258 A JPS5387258 A JP S5387258A JP 170377 A JP170377 A JP 170377A JP 170377 A JP170377 A JP 170377A JP S5387258 A JPS5387258 A JP S5387258A
Authority
JP
Japan
Prior art keywords
measuring device
exammined
warpage
sucking
examined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP170377A
Other languages
Japanese (ja)
Inventor
Tamotsu Karasawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP170377A priority Critical patent/JPS5387258A/en
Publication of JPS5387258A publication Critical patent/JPS5387258A/en
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

PURPOSE: To perform surface measurement of the object to be examined such as semiconductor wafer, etc. in a warpage-free state by vacuum-sucking the back surface of the elastically deformable plate form object to be exammined on a stage.
COPYRIGHT: (C)1978,JPO&Japio
JP170377A 1977-01-11 1977-01-11 Measuring device Pending JPS5387258A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP170377A JPS5387258A (en) 1977-01-11 1977-01-11 Measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP170377A JPS5387258A (en) 1977-01-11 1977-01-11 Measuring device

Publications (1)

Publication Number Publication Date
JPS5387258A true JPS5387258A (en) 1978-08-01

Family

ID=11508897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP170377A Pending JPS5387258A (en) 1977-01-11 1977-01-11 Measuring device

Country Status (1)

Country Link
JP (1) JPS5387258A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385331A (en) * 1986-09-29 1988-04-15 Shimadzu Corp Vacuum sucking apparatus
JPS63113946U (en) * 1987-01-19 1988-07-22
WO2020110532A1 (en) * 2018-11-28 2020-06-04 三菱電機株式会社 Thickness measurement device and thickness measurement method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385331A (en) * 1986-09-29 1988-04-15 Shimadzu Corp Vacuum sucking apparatus
JPS63113946U (en) * 1987-01-19 1988-07-22
WO2020110532A1 (en) * 2018-11-28 2020-06-04 三菱電機株式会社 Thickness measurement device and thickness measurement method
JPWO2020110532A1 (en) * 2018-11-28 2021-06-03 三菱電機株式会社 Thickness measuring device and thickness measuring method

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