JPS5439576A - Inspection method for semiconductor device - Google Patents
Inspection method for semiconductor deviceInfo
- Publication number
- JPS5439576A JPS5439576A JP10610577A JP10610577A JPS5439576A JP S5439576 A JPS5439576 A JP S5439576A JP 10610577 A JP10610577 A JP 10610577A JP 10610577 A JP10610577 A JP 10610577A JP S5439576 A JPS5439576 A JP S5439576A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- inspection method
- chips
- thin plate
- inspection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
PURPOSE: To seaprate chips from the thin plate automatically and to perform selection based on the result of inspection of chips, by performing chipping through fixing the wafer on a thin plate while unchanging the relative position.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10610577A JPS5439576A (en) | 1977-09-02 | 1977-09-02 | Inspection method for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10610577A JPS5439576A (en) | 1977-09-02 | 1977-09-02 | Inspection method for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5439576A true JPS5439576A (en) | 1979-03-27 |
Family
ID=14425207
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10610577A Pending JPS5439576A (en) | 1977-09-02 | 1977-09-02 | Inspection method for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5439576A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS611036A (en) * | 1984-06-13 | 1986-01-07 | Internatl Rectifier Corp Japan Ltd | Aligning method of semiconductor chip |
JPS61206232U (en) * | 1985-06-15 | 1986-12-26 | ||
JPS61206231U (en) * | 1985-06-15 | 1986-12-26 | ||
JPH0512947A (en) * | 1991-03-15 | 1993-01-22 | Tokin Corp | Reed switch |
JPH0512946A (en) * | 1991-03-15 | 1993-01-22 | Tokin Corp | Reed switch |
-
1977
- 1977-09-02 JP JP10610577A patent/JPS5439576A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS611036A (en) * | 1984-06-13 | 1986-01-07 | Internatl Rectifier Corp Japan Ltd | Aligning method of semiconductor chip |
JPH02854B2 (en) * | 1984-06-13 | 1990-01-09 | Nippon Inter Electronics Corp | |
JPS61206232U (en) * | 1985-06-15 | 1986-12-26 | ||
JPS61206231U (en) * | 1985-06-15 | 1986-12-26 | ||
JPH0512947A (en) * | 1991-03-15 | 1993-01-22 | Tokin Corp | Reed switch |
JPH0512946A (en) * | 1991-03-15 | 1993-01-22 | Tokin Corp | Reed switch |
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