JPS51135474A - To analyze a semiconductor device - Google Patents
To analyze a semiconductor deviceInfo
- Publication number
- JPS51135474A JPS51135474A JP50060676A JP6067675A JPS51135474A JP S51135474 A JPS51135474 A JP S51135474A JP 50060676 A JP50060676 A JP 50060676A JP 6067675 A JP6067675 A JP 6067675A JP S51135474 A JPS51135474 A JP S51135474A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- analyze
- sectional
- accuracy
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: Method of sectional analysis capable of detecting the sectional structure of a semiconductor device with accuracy.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50060676A JPS5820140B2 (en) | 1975-05-20 | 1975-05-20 | Analysis method for semiconductor devices |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50060676A JPS5820140B2 (en) | 1975-05-20 | 1975-05-20 | Analysis method for semiconductor devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51135474A true JPS51135474A (en) | 1976-11-24 |
JPS5820140B2 JPS5820140B2 (en) | 1983-04-21 |
Family
ID=13149151
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50060676A Expired JPS5820140B2 (en) | 1975-05-20 | 1975-05-20 | Analysis method for semiconductor devices |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5820140B2 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931038A (en) * | 1982-08-13 | 1984-02-18 | Oki Electric Ind Co Ltd | Structural analysis of semiconductor device |
JPS5943275U (en) * | 1982-09-14 | 1984-03-21 | 川崎重工業株式会社 | Mounting structure of motorcycle side stand |
JPS6064237A (en) * | 1983-09-20 | 1985-04-12 | Sumitomo Bakelite Co Ltd | Method for measuring degree of infiltration of water |
-
1975
- 1975-05-20 JP JP50060676A patent/JPS5820140B2/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5931038A (en) * | 1982-08-13 | 1984-02-18 | Oki Electric Ind Co Ltd | Structural analysis of semiconductor device |
JPS5943275U (en) * | 1982-09-14 | 1984-03-21 | 川崎重工業株式会社 | Mounting structure of motorcycle side stand |
JPS6221504Y2 (en) * | 1982-09-14 | 1987-06-01 | ||
JPS6064237A (en) * | 1983-09-20 | 1985-04-12 | Sumitomo Bakelite Co Ltd | Method for measuring degree of infiltration of water |
Also Published As
Publication number | Publication date |
---|---|
JPS5820140B2 (en) | 1983-04-21 |
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