JPS5410680A - Locating device of semiconductor wafers - Google Patents

Locating device of semiconductor wafers

Info

Publication number
JPS5410680A
JPS5410680A JP7582477A JP7582477A JPS5410680A JP S5410680 A JPS5410680 A JP S5410680A JP 7582477 A JP7582477 A JP 7582477A JP 7582477 A JP7582477 A JP 7582477A JP S5410680 A JPS5410680 A JP S5410680A
Authority
JP
Japan
Prior art keywords
semiconductor wafers
locating device
wafers
locating
manpower
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7582477A
Other languages
Japanese (ja)
Inventor
Seiji Imanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP7582477A priority Critical patent/JPS5410680A/en
Publication of JPS5410680A publication Critical patent/JPS5410680A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform locating of wafers surely and save locating work of wafer masks by manpower by fully automating the locating device of wafers necessary for automation of treatment processes of semiconductor wafers.
COPYRIGHT: (C)1979,JPO&Japio
JP7582477A 1977-06-24 1977-06-24 Locating device of semiconductor wafers Pending JPS5410680A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7582477A JPS5410680A (en) 1977-06-24 1977-06-24 Locating device of semiconductor wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7582477A JPS5410680A (en) 1977-06-24 1977-06-24 Locating device of semiconductor wafers

Publications (1)

Publication Number Publication Date
JPS5410680A true JPS5410680A (en) 1979-01-26

Family

ID=13587314

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7582477A Pending JPS5410680A (en) 1977-06-24 1977-06-24 Locating device of semiconductor wafers

Country Status (1)

Country Link
JP (1) JPS5410680A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62196000U (en) * 1986-06-03 1987-12-12
JPS6312197U (en) * 1986-07-11 1988-01-26
JPH02284040A (en) * 1989-04-25 1990-11-21 Asahi Glass Co Ltd Instrument and method for measuring mechanical strength of semiconductor wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62196000U (en) * 1986-06-03 1987-12-12
JPS6312197U (en) * 1986-07-11 1988-01-26
JPH02284040A (en) * 1989-04-25 1990-11-21 Asahi Glass Co Ltd Instrument and method for measuring mechanical strength of semiconductor wafer

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