JPS5410680A - Locating device of semiconductor wafers - Google Patents
Locating device of semiconductor wafersInfo
- Publication number
- JPS5410680A JPS5410680A JP7582477A JP7582477A JPS5410680A JP S5410680 A JPS5410680 A JP S5410680A JP 7582477 A JP7582477 A JP 7582477A JP 7582477 A JP7582477 A JP 7582477A JP S5410680 A JPS5410680 A JP S5410680A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafers
- locating device
- wafers
- locating
- manpower
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform locating of wafers surely and save locating work of wafer masks by manpower by fully automating the locating device of wafers necessary for automation of treatment processes of semiconductor wafers.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7582477A JPS5410680A (en) | 1977-06-24 | 1977-06-24 | Locating device of semiconductor wafers |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7582477A JPS5410680A (en) | 1977-06-24 | 1977-06-24 | Locating device of semiconductor wafers |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5410680A true JPS5410680A (en) | 1979-01-26 |
Family
ID=13587314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7582477A Pending JPS5410680A (en) | 1977-06-24 | 1977-06-24 | Locating device of semiconductor wafers |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5410680A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62196000U (en) * | 1986-06-03 | 1987-12-12 | ||
JPS6312197U (en) * | 1986-07-11 | 1988-01-26 | ||
JPH02284040A (en) * | 1989-04-25 | 1990-11-21 | Asahi Glass Co Ltd | Instrument and method for measuring mechanical strength of semiconductor wafer |
-
1977
- 1977-06-24 JP JP7582477A patent/JPS5410680A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62196000U (en) * | 1986-06-03 | 1987-12-12 | ||
JPS6312197U (en) * | 1986-07-11 | 1988-01-26 | ||
JPH02284040A (en) * | 1989-04-25 | 1990-11-21 | Asahi Glass Co Ltd | Instrument and method for measuring mechanical strength of semiconductor wafer |
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