JPS53142168A - Reproductive use of semiconductor substrate - Google Patents

Reproductive use of semiconductor substrate

Info

Publication number
JPS53142168A
JPS53142168A JP5719777A JP5719777A JPS53142168A JP S53142168 A JPS53142168 A JP S53142168A JP 5719777 A JP5719777 A JP 5719777A JP 5719777 A JP5719777 A JP 5719777A JP S53142168 A JPS53142168 A JP S53142168A
Authority
JP
Japan
Prior art keywords
semiconductor substrate
reproductive use
reproductive
course
ensure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5719777A
Other languages
Japanese (ja)
Inventor
Kinzo Tao
Kimio Nakada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5719777A priority Critical patent/JPS53142168A/en
Publication of JPS53142168A publication Critical patent/JPS53142168A/en
Pending legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

PURPOSE: To ensure an effective reproductive use of the faulty substrate which is caused in the course of the manufacturing process.
COPYRIGHT: (C)1978,JPO&Japio
JP5719777A 1977-05-18 1977-05-18 Reproductive use of semiconductor substrate Pending JPS53142168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5719777A JPS53142168A (en) 1977-05-18 1977-05-18 Reproductive use of semiconductor substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5719777A JPS53142168A (en) 1977-05-18 1977-05-18 Reproductive use of semiconductor substrate

Publications (1)

Publication Number Publication Date
JPS53142168A true JPS53142168A (en) 1978-12-11

Family

ID=13048757

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5719777A Pending JPS53142168A (en) 1977-05-18 1977-05-18 Reproductive use of semiconductor substrate

Country Status (1)

Country Link
JP (1) JPS53142168A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029569A1 (en) * 2003-09-19 2005-03-31 Mimasu Semiconductor Industry Co. Ltd. Silicon wafer reclamation method and reclaimed wafer
JP2010524208A (en) * 2007-03-31 2010-07-15 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド Method for stripping material for wafer reclamation

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005029569A1 (en) * 2003-09-19 2005-03-31 Mimasu Semiconductor Industry Co. Ltd. Silicon wafer reclamation method and reclaimed wafer
JP2010524208A (en) * 2007-03-31 2010-07-15 アドバンスド テクノロジー マテリアルズ，インコーポレイテッド Method for stripping material for wafer reclamation

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