JPS5357781A - Semiconductor integrated circuit - Google Patents
Semiconductor integrated circuitInfo
- Publication number
- JPS5357781A JPS5357781A JP13237176A JP13237176A JPS5357781A JP S5357781 A JPS5357781 A JP S5357781A JP 13237176 A JP13237176 A JP 13237176A JP 13237176 A JP13237176 A JP 13237176A JP S5357781 A JPS5357781 A JP S5357781A
- Authority
- JP
- Japan
- Prior art keywords
- integrated circuit
- semiconductor integrated
- denser
- contact holes
- inside angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain an LSI mask denser than before by using polygonal contact holes other than 90° of inside angle.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13237176A JPS5357781A (en) | 1976-11-05 | 1976-11-05 | Semiconductor integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13237176A JPS5357781A (en) | 1976-11-05 | 1976-11-05 | Semiconductor integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5357781A true JPS5357781A (en) | 1978-05-25 |
Family
ID=15079797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13237176A Pending JPS5357781A (en) | 1976-11-05 | 1976-11-05 | Semiconductor integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5357781A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60194542A (en) * | 1984-03-16 | 1985-10-03 | Rohm Co Ltd | Forming method of pattern for inter-layer insulating film |
JPS63318141A (en) * | 1987-06-19 | 1988-12-27 | Mitsubishi Electric Corp | Semiconductor device |
JPH01117045A (en) * | 1987-10-29 | 1989-05-09 | Seiko Epson Corp | Semiconductor integrated circuit device |
-
1976
- 1976-11-05 JP JP13237176A patent/JPS5357781A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60194542A (en) * | 1984-03-16 | 1985-10-03 | Rohm Co Ltd | Forming method of pattern for inter-layer insulating film |
JPS63318141A (en) * | 1987-06-19 | 1988-12-27 | Mitsubishi Electric Corp | Semiconductor device |
JPH01117045A (en) * | 1987-10-29 | 1989-05-09 | Seiko Epson Corp | Semiconductor integrated circuit device |
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