JPS51111071A - Semiconductor equipment - Google Patents

Semiconductor equipment

Info

Publication number
JPS51111071A
JPS51111071A JP3556575A JP3556575A JPS51111071A JP S51111071 A JPS51111071 A JP S51111071A JP 3556575 A JP3556575 A JP 3556575A JP 3556575 A JP3556575 A JP 3556575A JP S51111071 A JPS51111071 A JP S51111071A
Authority
JP
Japan
Prior art keywords
semiconductor equipment
semiconductor
equipment
different depths
etching holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3556575A
Other languages
Japanese (ja)
Inventor
Hideo Sunami
Yoshifumi Kawamoto
Shigeru Nishimatsu
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3556575A priority Critical patent/JPS51111071A/en
Publication of JPS51111071A publication Critical patent/JPS51111071A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form simultaneously multiple etching holes of different depths.
COPYRIGHT: (C)1976,JPO&Japio
JP3556575A 1975-03-26 1975-03-26 Semiconductor equipment Pending JPS51111071A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3556575A JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3556575A JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Publications (1)

Publication Number Publication Date
JPS51111071A true JPS51111071A (en) 1976-10-01

Family

ID=12445261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3556575A Pending JPS51111071A (en) 1975-03-26 1975-03-26 Semiconductor equipment

Country Status (1)

Country Link
JP (1) JPS51111071A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113267A (en) * 1980-11-19 1982-07-14 Ibm Method of producing semiconductor device
JPS57148370A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device
JPS60113430A (en) * 1983-11-24 1985-06-19 Mitsubishi Electric Corp Semiconductor device
JPS60160125A (en) * 1984-01-30 1985-08-21 Mitsubishi Electric Corp Manufacture of semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57113267A (en) * 1980-11-19 1982-07-14 Ibm Method of producing semiconductor device
JPH0235468B2 (en) * 1980-11-19 1990-08-10 Intaanashonaru Bijinesu Mashiinzu Corp
JPS57148370A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device
JPS60113430A (en) * 1983-11-24 1985-06-19 Mitsubishi Electric Corp Semiconductor device
JPS60160125A (en) * 1984-01-30 1985-08-21 Mitsubishi Electric Corp Manufacture of semiconductor device

Similar Documents

Publication Publication Date Title
JPS51126894A (en) Voltammetry apparatus
JPS51111071A (en) Semiconductor equipment
JPS51112193A (en) Processing method of semiconductor equipment
JPS51126072A (en) Pattern formation equipment
JPS5419367A (en) Production of semiconductor device
JPS51146192A (en) Diode device fabrication method
JPS53123083A (en) Production of semiconductor device
JPS5279664A (en) Forming method for electrodes of semiconductor devices
JPS5232675A (en) Etching solution for chemical compound
JPS5357781A (en) Semiconductor integrated circuit
JPS51123086A (en) Semicanductor device and its production process
JPS51123582A (en) Semiconductor device production system
JPS524780A (en) Manufacturing method of semiconductor equipment
JPS5410682A (en) Production of semiconductor elements
JPS51118369A (en) Manufacturing process for simiconduator unit
JPS5219652A (en) Preparation of leucylagmatine compounds
JPS5227368A (en) Selection etching method
JPS5235813A (en) Small sized type synchronized motor
JPS523786A (en) Punching equipment
JPS51142978A (en) Mounting method of circuit elements
JPS51135473A (en) Surface treatment agent of semi- conductor elements
JPS52141565A (en) Manufacture of semiconductor unit
JPS51151089A (en) Manufacturing method of a semiconductor
JPS51137383A (en) Semi conductor wafer evaluation
JPS5252372A (en) Semiconductor device