JPS53123083A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS53123083A JPS53123083A JP3741277A JP3741277A JPS53123083A JP S53123083 A JPS53123083 A JP S53123083A JP 3741277 A JP3741277 A JP 3741277A JP 3741277 A JP3741277 A JP 3741277A JP S53123083 A JPS53123083 A JP S53123083A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- spreading
- semiconductor substrate
- different materials
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To obtain transistors of good electrical characteristics without spreading of base regions by using plural masks of different materials at the time of etching semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3741277A JPS53123083A (en) | 1977-04-01 | 1977-04-01 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3741277A JPS53123083A (en) | 1977-04-01 | 1977-04-01 | Production of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS53123083A true JPS53123083A (en) | 1978-10-27 |
JPS557024B2 JPS557024B2 (en) | 1980-02-21 |
Family
ID=12496799
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3741277A Granted JPS53123083A (en) | 1977-04-01 | 1977-04-01 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS53123083A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS546775A (en) * | 1977-06-17 | 1979-01-19 | Nec Corp | Semiconductor device featuring stepped electrode structure |
JPS5690561A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10585404B2 (en) | 2015-05-29 | 2020-03-10 | Makino Milling Machine Co., Ltd. | Machining time-estimating method for wire electrical discharge machine and control device for wire electrical discharge machine |
-
1977
- 1977-04-01 JP JP3741277A patent/JPS53123083A/en active Granted
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS546775A (en) * | 1977-06-17 | 1979-01-19 | Nec Corp | Semiconductor device featuring stepped electrode structure |
JPS5690561A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS6220711B2 (en) * | 1979-12-22 | 1987-05-08 | Fujitsu Ltd |
Also Published As
Publication number | Publication date |
---|---|
JPS557024B2 (en) | 1980-02-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5224478A (en) | Semiconductor device manufacturing process | |
JPS52140280A (en) | Semiconductor device | |
JPS5395571A (en) | Semiconductor device | |
JPS53123083A (en) | Production of semiconductor device | |
JPS5441665A (en) | Manufacture for semiconductor device | |
JPS51111071A (en) | Semiconductor equipment | |
JPS5419367A (en) | Production of semiconductor device | |
JPS5267271A (en) | Formation of through-hole onto semiconductor substrate | |
JPS5417677A (en) | Manufacture of semiconductor | |
JPS5316586A (en) | Semiconductor device | |
JPS51118369A (en) | Manufacturing process for simiconduator unit | |
JPS52141565A (en) | Manufacture of semiconductor unit | |
JPS548971A (en) | Manufacture of semiconductor device | |
JPS5310281A (en) | Production of mos type semiconductor integrated circuit | |
JPS51112266A (en) | Semiconductor device production method | |
JPS5424574A (en) | Manufacture for semiconductor device | |
JPS5286087A (en) | Manufacture of semiconductor device | |
JPS51113469A (en) | Manufacturing method of semiconductor device | |
JPS5425160A (en) | Manufacture of semiconductor device | |
JPS526090A (en) | Semiconductor integrated circuit | |
JPS5389680A (en) | Production of semiconductor device | |
JPS5217777A (en) | Semiconductor device | |
JPS5252372A (en) | Semiconductor device | |
JPS547886A (en) | Semiconductor device | |
JPS5428580A (en) | Manufacture of semiconductor device |