JPS53123083A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53123083A
JPS53123083A JP3741277A JP3741277A JPS53123083A JP S53123083 A JPS53123083 A JP S53123083A JP 3741277 A JP3741277 A JP 3741277A JP 3741277 A JP3741277 A JP 3741277A JP S53123083 A JPS53123083 A JP S53123083A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
spreading
semiconductor substrate
different materials
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3741277A
Other languages
Japanese (ja)
Other versions
JPS557024B2 (en
Inventor
Tetsushi Sakai
Hiroki Yamauchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP3741277A priority Critical patent/JPS53123083A/en
Publication of JPS53123083A publication Critical patent/JPS53123083A/en
Publication of JPS557024B2 publication Critical patent/JPS557024B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE: To obtain transistors of good electrical characteristics without spreading of base regions by using plural masks of different materials at the time of etching semiconductor substrate.
COPYRIGHT: (C)1978,JPO&Japio
JP3741277A 1977-04-01 1977-04-01 Production of semiconductor device Granted JPS53123083A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3741277A JPS53123083A (en) 1977-04-01 1977-04-01 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3741277A JPS53123083A (en) 1977-04-01 1977-04-01 Production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS53123083A true JPS53123083A (en) 1978-10-27
JPS557024B2 JPS557024B2 (en) 1980-02-21

Family

ID=12496799

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3741277A Granted JPS53123083A (en) 1977-04-01 1977-04-01 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53123083A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546775A (en) * 1977-06-17 1979-01-19 Nec Corp Semiconductor device featuring stepped electrode structure
JPS5690561A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10585404B2 (en) 2015-05-29 2020-03-10 Makino Milling Machine Co., Ltd. Machining time-estimating method for wire electrical discharge machine and control device for wire electrical discharge machine

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS546775A (en) * 1977-06-17 1979-01-19 Nec Corp Semiconductor device featuring stepped electrode structure
JPS5690561A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device
JPS6220711B2 (en) * 1979-12-22 1987-05-08 Fujitsu Ltd

Also Published As

Publication number Publication date
JPS557024B2 (en) 1980-02-21

Similar Documents

Publication Publication Date Title
JPS5224478A (en) Semiconductor device manufacturing process
JPS52140280A (en) Semiconductor device
JPS5395571A (en) Semiconductor device
JPS53123083A (en) Production of semiconductor device
JPS5441665A (en) Manufacture for semiconductor device
JPS51111071A (en) Semiconductor equipment
JPS5419367A (en) Production of semiconductor device
JPS5267271A (en) Formation of through-hole onto semiconductor substrate
JPS5417677A (en) Manufacture of semiconductor
JPS5316586A (en) Semiconductor device
JPS51118369A (en) Manufacturing process for simiconduator unit
JPS52141565A (en) Manufacture of semiconductor unit
JPS548971A (en) Manufacture of semiconductor device
JPS5310281A (en) Production of mos type semiconductor integrated circuit
JPS51112266A (en) Semiconductor device production method
JPS5424574A (en) Manufacture for semiconductor device
JPS5286087A (en) Manufacture of semiconductor device
JPS51113469A (en) Manufacturing method of semiconductor device
JPS5425160A (en) Manufacture of semiconductor device
JPS526090A (en) Semiconductor integrated circuit
JPS5389680A (en) Production of semiconductor device
JPS5217777A (en) Semiconductor device
JPS5252372A (en) Semiconductor device
JPS547886A (en) Semiconductor device
JPS5428580A (en) Manufacture of semiconductor device