JPS51112193A - Processing method of semiconductor equipment - Google Patents
Processing method of semiconductor equipmentInfo
- Publication number
- JPS51112193A JPS51112193A JP3658975A JP3658975A JPS51112193A JP S51112193 A JPS51112193 A JP S51112193A JP 3658975 A JP3658975 A JP 3658975A JP 3658975 A JP3658975 A JP 3658975A JP S51112193 A JPS51112193 A JP S51112193A
- Authority
- JP
- Japan
- Prior art keywords
- processing method
- semiconductor equipment
- make
- polylayer
- compose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To make the size of the basic element to compose the semiconductor integrated circuit as small as possible and to make the polylayer wiring enable.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50036589A JPS5828734B2 (en) | 1975-03-28 | 1975-03-28 | hand tai souchi no seizou houhou |
US05/667,445 US4069067A (en) | 1975-03-20 | 1976-03-16 | Method of making a semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50036589A JPS5828734B2 (en) | 1975-03-28 | 1975-03-28 | hand tai souchi no seizou houhou |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51112193A true JPS51112193A (en) | 1976-10-04 |
JPS5828734B2 JPS5828734B2 (en) | 1983-06-17 |
Family
ID=12473952
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50036589A Expired JPS5828734B2 (en) | 1975-03-20 | 1975-03-28 | hand tai souchi no seizou houhou |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5828734B2 (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5478985A (en) * | 1977-11-17 | 1979-06-23 | Rca Corp | Semiconductor and method of producing same |
JPS5489594A (en) * | 1977-12-27 | 1979-07-16 | Nec Corp | Manufacture for integrated circuit |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS59108317A (en) * | 1982-12-13 | 1984-06-22 | Mitsubishi Electric Corp | Forming method of electrode wiring |
JP2007327511A (en) * | 2006-06-06 | 2007-12-20 | Nok Corp | Vibration damping mount |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502472A (en) * | 1973-05-08 | 1975-01-11 |
-
1975
- 1975-03-28 JP JP50036589A patent/JPS5828734B2/en not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS502472A (en) * | 1973-05-08 | 1975-01-11 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5478985A (en) * | 1977-11-17 | 1979-06-23 | Rca Corp | Semiconductor and method of producing same |
JPS5489594A (en) * | 1977-12-27 | 1979-07-16 | Nec Corp | Manufacture for integrated circuit |
JPS5534492A (en) * | 1978-09-02 | 1980-03-11 | Nippon Telegr & Teleph Corp <Ntt> | Semiconductor integrated circuit device having mis field effect type transistor and its manufacture |
JPS59108317A (en) * | 1982-12-13 | 1984-06-22 | Mitsubishi Electric Corp | Forming method of electrode wiring |
JP2007327511A (en) * | 2006-06-06 | 2007-12-20 | Nok Corp | Vibration damping mount |
Also Published As
Publication number | Publication date |
---|---|
JPS5828734B2 (en) | 1983-06-17 |
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