JPS53120383A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS53120383A
JPS53120383A JP3628777A JP3628777A JPS53120383A JP S53120383 A JPS53120383 A JP S53120383A JP 3628777 A JP3628777 A JP 3628777A JP 3628777 A JP3628777 A JP 3628777A JP S53120383 A JPS53120383 A JP S53120383A
Authority
JP
Japan
Prior art keywords
production
semiconductor
semiconductor devices
same
improvemnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3628777A
Other languages
Japanese (ja)
Inventor
Izumi Tanaka
Kazunari Shirai
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP3628777A priority Critical patent/JPS53120383A/en
Publication of JPS53120383A publication Critical patent/JPS53120383A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To add a simple improvemnet to the process for producing semiconductor devices of double gate structure and produce dissimilar kinds of semiconductor devices used for peripheral circuits at the same instant of the production of the same.
COPYRIGHT: (C)1978,JPO&Japio
JP3628777A 1977-03-30 1977-03-30 Production of semiconductor device Pending JPS53120383A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3628777A JPS53120383A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3628777A JPS53120383A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS53120383A true JPS53120383A (en) 1978-10-20

Family

ID=12465565

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3628777A Pending JPS53120383A (en) 1977-03-30 1977-03-30 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS53120383A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591877A (en) * 1978-12-30 1980-07-11 Fujitsu Ltd Manufacture of semiconductor device
JPS5649573A (en) * 1979-09-28 1981-05-06 Seiko Epson Corp Semiconductor device
JPS56120166A (en) * 1980-02-27 1981-09-21 Hitachi Ltd Semiconductor ic device and manufacture thereof
JPS5825272A (en) * 1981-08-07 1983-02-15 Toshiba Corp Mos integrated circuit
JPS6245165A (en) * 1985-08-23 1987-02-27 Hitachi Ltd Manufacture of semiconductor integrated circuit device
JPH0296378A (en) * 1989-05-24 1990-04-09 Hitachi Ltd Semiconductor integrated circuit device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915380A (en) * 1972-05-18 1974-02-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4915380A (en) * 1972-05-18 1974-02-09

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5591877A (en) * 1978-12-30 1980-07-11 Fujitsu Ltd Manufacture of semiconductor device
JPS5649573A (en) * 1979-09-28 1981-05-06 Seiko Epson Corp Semiconductor device
JPS56120166A (en) * 1980-02-27 1981-09-21 Hitachi Ltd Semiconductor ic device and manufacture thereof
JPS5825272A (en) * 1981-08-07 1983-02-15 Toshiba Corp Mos integrated circuit
JPS6245165A (en) * 1985-08-23 1987-02-27 Hitachi Ltd Manufacture of semiconductor integrated circuit device
JPH0296378A (en) * 1989-05-24 1990-04-09 Hitachi Ltd Semiconductor integrated circuit device
JPH0568863B2 (en) * 1989-05-24 1993-09-29 Hitachi Ltd

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