JPS51147286A - Manufacturing process of semiconductor - Google Patents

Manufacturing process of semiconductor

Info

Publication number
JPS51147286A
JPS51147286A JP7174675A JP7174675A JPS51147286A JP S51147286 A JPS51147286 A JP S51147286A JP 7174675 A JP7174675 A JP 7174675A JP 7174675 A JP7174675 A JP 7174675A JP S51147286 A JPS51147286 A JP S51147286A
Authority
JP
Japan
Prior art keywords
manufacturing process
semiconductor
wiring
semiconductor device
thermal stability
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7174675A
Other languages
Japanese (ja)
Inventor
Masaharu Yorikane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP7174675A priority Critical patent/JPS51147286A/en
Publication of JPS51147286A publication Critical patent/JPS51147286A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To obtain easy wiring which features thermal stability and high integration in a manufacturing process for a semiconductor device having a multilayer wiring.
COPYRIGHT: (C)1976,JPO&Japio
JP7174675A 1975-06-13 1975-06-13 Manufacturing process of semiconductor Pending JPS51147286A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7174675A JPS51147286A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7174675A JPS51147286A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor

Publications (1)

Publication Number Publication Date
JPS51147286A true JPS51147286A (en) 1976-12-17

Family

ID=13469386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7174675A Pending JPS51147286A (en) 1975-06-13 1975-06-13 Manufacturing process of semiconductor

Country Status (1)

Country Link
JP (1) JPS51147286A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462788A (en) * 1977-10-20 1979-05-21 Ibm Method of forming mutual connection between twoolevel metal conductors
JPS5599746A (en) * 1979-01-24 1980-07-30 Nec Corp Method for construction of multi-layer wiring
JPS5768051A (en) * 1980-10-15 1982-04-26 Mitsubishi Electric Corp Forming method for metallic wire in semiconductor device
JPS6376443A (en) * 1986-09-19 1988-04-06 Nec Corp Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866783A (en) * 1971-12-16 1973-09-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866783A (en) * 1971-12-16 1973-09-12

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5462788A (en) * 1977-10-20 1979-05-21 Ibm Method of forming mutual connection between twoolevel metal conductors
JPS5599746A (en) * 1979-01-24 1980-07-30 Nec Corp Method for construction of multi-layer wiring
JPS5768051A (en) * 1980-10-15 1982-04-26 Mitsubishi Electric Corp Forming method for metallic wire in semiconductor device
JPS6376443A (en) * 1986-09-19 1988-04-06 Nec Corp Semiconductor device

Similar Documents

Publication Publication Date Title
JPS51147286A (en) Manufacturing process of semiconductor
JPS522173A (en) Semiconductor integrated circuit
JPS53120383A (en) Production of semiconductor device
JPS51112193A (en) Processing method of semiconductor equipment
JPS51118391A (en) Manufacturing process for semiconducter unit
JPS5263672A (en) Production of semiconductor device
JPS51123582A (en) Semiconductor device production system
JPS5236986A (en) Semiconductor integrated circuit device
JPS5219975A (en) Semiconductor device
JPS5240061A (en) Semiconductor device and process for production of same
JPS51121272A (en) Manufacturing method for semiconductor devices
JPS531471A (en) Manufacture for semiconductor device
JPS51123086A (en) Semicanductor device and its production process
JPS5261960A (en) Production of semiconductor device
JPS5249783A (en) Semiconductor device and process for production of same
JPS51111478A (en) A method of producing semiconductor crystal
JPS524780A (en) Manufacturing method of semiconductor equipment
JPS51150286A (en) Production method of semiconductor device
JPS53142168A (en) Reproductive use of semiconductor substrate
JPS51151089A (en) Manufacturing method of a semiconductor
JPS5227286A (en) Semiconductor manufacturing process
JPS51112266A (en) Semiconductor device production method
JPS5273673A (en) Production of semiconductor device
JPS52179A (en) Method of fabricating semiconductor
JPS51134587A (en) Production method of semiconductor integrated-circuit device