JPS51147286A - Manufacturing process of semiconductor - Google Patents
Manufacturing process of semiconductorInfo
- Publication number
- JPS51147286A JPS51147286A JP7174675A JP7174675A JPS51147286A JP S51147286 A JPS51147286 A JP S51147286A JP 7174675 A JP7174675 A JP 7174675A JP 7174675 A JP7174675 A JP 7174675A JP S51147286 A JPS51147286 A JP S51147286A
- Authority
- JP
- Japan
- Prior art keywords
- manufacturing process
- semiconductor
- wiring
- semiconductor device
- thermal stability
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To obtain easy wiring which features thermal stability and high integration in a manufacturing process for a semiconductor device having a multilayer wiring.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7174675A JPS51147286A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7174675A JPS51147286A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51147286A true JPS51147286A (en) | 1976-12-17 |
Family
ID=13469386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7174675A Pending JPS51147286A (en) | 1975-06-13 | 1975-06-13 | Manufacturing process of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51147286A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5462788A (en) * | 1977-10-20 | 1979-05-21 | Ibm | Method of forming mutual connection between twoolevel metal conductors |
JPS5599746A (en) * | 1979-01-24 | 1980-07-30 | Nec Corp | Method for construction of multi-layer wiring |
JPS5768051A (en) * | 1980-10-15 | 1982-04-26 | Mitsubishi Electric Corp | Forming method for metallic wire in semiconductor device |
JPS6376443A (en) * | 1986-09-19 | 1988-04-06 | Nec Corp | Semiconductor device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866783A (en) * | 1971-12-16 | 1973-09-12 |
-
1975
- 1975-06-13 JP JP7174675A patent/JPS51147286A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866783A (en) * | 1971-12-16 | 1973-09-12 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5462788A (en) * | 1977-10-20 | 1979-05-21 | Ibm | Method of forming mutual connection between twoolevel metal conductors |
JPS5599746A (en) * | 1979-01-24 | 1980-07-30 | Nec Corp | Method for construction of multi-layer wiring |
JPS5768051A (en) * | 1980-10-15 | 1982-04-26 | Mitsubishi Electric Corp | Forming method for metallic wire in semiconductor device |
JPS6376443A (en) * | 1986-09-19 | 1988-04-06 | Nec Corp | Semiconductor device |
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