JPS51121272A - Manufacturing method for semiconductor devices - Google Patents

Manufacturing method for semiconductor devices

Info

Publication number
JPS51121272A
JPS51121272A JP4703475A JP4703475A JPS51121272A JP S51121272 A JPS51121272 A JP S51121272A JP 4703475 A JP4703475 A JP 4703475A JP 4703475 A JP4703475 A JP 4703475A JP S51121272 A JPS51121272 A JP S51121272A
Authority
JP
Japan
Prior art keywords
semiconductor devices
wiring
gate
construction
prevents breakage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4703475A
Other languages
Japanese (ja)
Inventor
Atsushi Ueno
Takeshi Ishihara
Original Assignee
Matsushita Electric Ind Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Ind Co Ltd filed Critical Matsushita Electric Ind Co Ltd
Priority to JP4703475A priority Critical patent/JPS51121272A/en
Publication of JPS51121272A publication Critical patent/JPS51121272A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To provide a method of construction that prevents breakage of the wiring in Si gate MOST.
COPYRIGHT: (C)1976,JPO&Japio
JP4703475A 1975-04-17 1975-04-17 Manufacturing method for semiconductor devices Pending JPS51121272A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4703475A JPS51121272A (en) 1975-04-17 1975-04-17 Manufacturing method for semiconductor devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4703475A JPS51121272A (en) 1975-04-17 1975-04-17 Manufacturing method for semiconductor devices

Publications (1)

Publication Number Publication Date
JPS51121272A true JPS51121272A (en) 1976-10-23

Family

ID=12763877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4703475A Pending JPS51121272A (en) 1975-04-17 1975-04-17 Manufacturing method for semiconductor devices

Country Status (1)

Country Link
JP (1) JPS51121272A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148365A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device and manufacture thereof
JPH0521460A (en) * 1990-12-25 1993-01-29 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device
US6838698B1 (en) 1990-12-25 2005-01-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having source/channel or drain/channel boundary regions
US7253437B2 (en) 1990-12-25 2007-08-07 Semiconductor Energy Laboratory Co., Ltd. Display device having a thin film transistor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57148365A (en) * 1981-03-10 1982-09-13 Nec Corp Semiconductor device and manufacture thereof
JPH0521460A (en) * 1990-12-25 1993-01-29 Semiconductor Energy Lab Co Ltd Manufacture of semiconductor device
US6838698B1 (en) 1990-12-25 2005-01-04 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device having source/channel or drain/channel boundary regions
US7253437B2 (en) 1990-12-25 2007-08-07 Semiconductor Energy Laboratory Co., Ltd. Display device having a thin film transistor
US7375375B2 (en) 1990-12-25 2008-05-20 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method for forming the same

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