JPS5261960A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5261960A
JPS5261960A JP13886475A JP13886475A JPS5261960A JP S5261960 A JPS5261960 A JP S5261960A JP 13886475 A JP13886475 A JP 13886475A JP 13886475 A JP13886475 A JP 13886475A JP S5261960 A JPS5261960 A JP S5261960A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
mos
self
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13886475A
Other languages
Japanese (ja)
Inventor
Kazunari Shirai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP13886475A priority Critical patent/JPS5261960A/en
Publication of JPS5261960A publication Critical patent/JPS5261960A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
  • Electrodes Of Semiconductors (AREA)

Abstract

PURPOSE: To improve the contact of a substrate and wiring layer in a self-alignment method of MOS.
COPYRIGHT: (C)1977,JPO&Japio
JP13886475A 1975-11-18 1975-11-18 Production of semiconductor device Pending JPS5261960A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13886475A JPS5261960A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13886475A JPS5261960A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5261960A true JPS5261960A (en) 1977-05-21

Family

ID=15231904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13886475A Pending JPS5261960A (en) 1975-11-18 1975-11-18 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5261960A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451785A (en) * 1977-10-03 1979-04-23 Oki Electric Ind Co Ltd Manufacture of mos-type semiconductor
JPS5650535A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Manufacture of semiconductor device
JPS56162873A (en) * 1980-05-19 1981-12-15 Nec Corp Insulated gate type field effect semiconductor device
JPS5832469A (en) * 1981-08-20 1983-02-25 Matsushita Electric Ind Co Ltd Semiconductor device and manufacture thereof

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120581A (en) * 1974-03-07 1975-09-20
JPS5151279A (en) * 1974-10-31 1976-05-06 Oki Electric Ind Co Ltd HANDOTAISHUSEKIKAIRONO SEIZOHOHO

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120581A (en) * 1974-03-07 1975-09-20
JPS5151279A (en) * 1974-10-31 1976-05-06 Oki Electric Ind Co Ltd HANDOTAISHUSEKIKAIRONO SEIZOHOHO

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5451785A (en) * 1977-10-03 1979-04-23 Oki Electric Ind Co Ltd Manufacture of mos-type semiconductor
JPS5927098B2 (en) * 1977-10-03 1984-07-03 沖電気工業株式会社 Method for manufacturing MOS type semiconductor integrated circuit
JPS5650535A (en) * 1979-10-01 1981-05-07 Hitachi Ltd Manufacture of semiconductor device
JPS56162873A (en) * 1980-05-19 1981-12-15 Nec Corp Insulated gate type field effect semiconductor device
JPS5832469A (en) * 1981-08-20 1983-02-25 Matsushita Electric Ind Co Ltd Semiconductor device and manufacture thereof

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