JPS5258463A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5258463A
JPS5258463A JP13405175A JP13405175A JPS5258463A JP S5258463 A JPS5258463 A JP S5258463A JP 13405175 A JP13405175 A JP 13405175A JP 13405175 A JP13405175 A JP 13405175A JP S5258463 A JPS5258463 A JP S5258463A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
electrode
forming
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13405175A
Other languages
Japanese (ja)
Inventor
Seiichi Iwamatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13405175A priority Critical patent/JPS5258463A/en
Publication of JPS5258463A publication Critical patent/JPS5258463A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Weting (AREA)

Abstract

PURPOSE: To prevent the electrode fromed on a semiconductor substrate from contacting the semiconductor layer other than diffusion layer by forming the electrode by using the diffusion hole as a contact hole as it is, in the process of forming the electrode on a semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP13405175A 1975-11-10 1975-11-10 Production of semiconductor device Pending JPS5258463A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13405175A JPS5258463A (en) 1975-11-10 1975-11-10 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13405175A JPS5258463A (en) 1975-11-10 1975-11-10 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5258463A true JPS5258463A (en) 1977-05-13

Family

ID=15119209

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13405175A Pending JPS5258463A (en) 1975-11-10 1975-11-10 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5258463A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658229A (en) * 1979-10-16 1981-05-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS5723221A (en) * 1980-07-16 1982-02-06 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH02275640A (en) * 1989-01-26 1990-11-09 Matsushita Electric Works Ltd Manufacture of electrostatic-induction semiconductor device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658229A (en) * 1979-10-16 1981-05-21 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS6226573B2 (en) * 1979-10-16 1987-06-09 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS5723221A (en) * 1980-07-16 1982-02-06 Mitsubishi Electric Corp Manufacture of semiconductor device
JPH02275640A (en) * 1989-01-26 1990-11-09 Matsushita Electric Works Ltd Manufacture of electrostatic-induction semiconductor device

Similar Documents

Publication Publication Date Title
JPS5240969A (en) Process for production of semiconductor device
JPS5258463A (en) Production of semiconductor device
JPS5248468A (en) Process for production of semiconductor device
JPS5240968A (en) Process for production of semiconductor device
JPS5261960A (en) Production of semiconductor device
JPS51134566A (en) Semiconductor unit manufacturing process
JPS5274280A (en) Semiconductor device and its production
JPS5279654A (en) Production of semiconductor device
JPS5228879A (en) Semiconductor device and method for its production
JPS51112266A (en) Semiconductor device production method
JPS534469A (en) Semiconductor device
JPS5240061A (en) Semiconductor device and process for production of same
JPS52130567A (en) Preparation of semiconductor device
JPS5260071A (en) Production of semiconductor device
JPS5259588A (en) Production of semiconductor element
JPS51123558A (en) Manufacturing method of plate semiconductor
JPS5273673A (en) Production of semiconductor device
JPS5242375A (en) Process for production of semiconductor device
JPS5335390A (en) Production of semiconductor device
JPS5261956A (en) Production of semiconductor device
JPS5312268A (en) Production of semiconductor device
JPS5236978A (en) Process for production of semiconductor devices
JPS51139260A (en) Method of manufacturing semi_conductor device
JPS52129382A (en) Production of mis semiconductor device
JPS5257788A (en) Semiconductor device