JPS5335390A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5335390A JPS5335390A JP10883576A JP10883576A JPS5335390A JP S5335390 A JPS5335390 A JP S5335390A JP 10883576 A JP10883576 A JP 10883576A JP 10883576 A JP10883576 A JP 10883576A JP S5335390 A JPS5335390 A JP S5335390A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- electrodes
- gates
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To simplify processes by simultaneously performing connection hole forming process for electrodes such as of substrate, gates, etc. and wiring process for metal electrodes with one photoetching process.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10883576A JPS5335390A (en) | 1976-09-13 | 1976-09-13 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10883576A JPS5335390A (en) | 1976-09-13 | 1976-09-13 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5335390A true JPS5335390A (en) | 1978-04-01 |
Family
ID=14494752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10883576A Pending JPS5335390A (en) | 1976-09-13 | 1976-09-13 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5335390A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585808A (en) * | 1982-02-04 | 1986-04-29 | The Goodyear Tire & Rubber Company | Monomer removal from a polymer |
-
1976
- 1976-09-13 JP JP10883576A patent/JPS5335390A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4585808A (en) * | 1982-02-04 | 1986-04-29 | The Goodyear Tire & Rubber Company | Monomer removal from a polymer |
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