JPS5335390A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5335390A
JPS5335390A JP10883576A JP10883576A JPS5335390A JP S5335390 A JPS5335390 A JP S5335390A JP 10883576 A JP10883576 A JP 10883576A JP 10883576 A JP10883576 A JP 10883576A JP S5335390 A JPS5335390 A JP S5335390A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
electrodes
gates
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10883576A
Other languages
Japanese (ja)
Inventor
Kenji Murakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10883576A priority Critical patent/JPS5335390A/en
Publication of JPS5335390A publication Critical patent/JPS5335390A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To simplify processes by simultaneously performing connection hole forming process for electrodes such as of substrate, gates, etc. and wiring process for metal electrodes with one photoetching process.
COPYRIGHT: (C)1978,JPO&Japio
JP10883576A 1976-09-13 1976-09-13 Production of semiconductor device Pending JPS5335390A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10883576A JPS5335390A (en) 1976-09-13 1976-09-13 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10883576A JPS5335390A (en) 1976-09-13 1976-09-13 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5335390A true JPS5335390A (en) 1978-04-01

Family

ID=14494752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10883576A Pending JPS5335390A (en) 1976-09-13 1976-09-13 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5335390A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585808A (en) * 1982-02-04 1986-04-29 The Goodyear Tire & Rubber Company Monomer removal from a polymer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4585808A (en) * 1982-02-04 1986-04-29 The Goodyear Tire & Rubber Company Monomer removal from a polymer

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