JPS5247690A - Process for production of semiconductor device - Google Patents

Process for production of semiconductor device

Info

Publication number
JPS5247690A
JPS5247690A JP12409575A JP12409575A JPS5247690A JP S5247690 A JPS5247690 A JP S5247690A JP 12409575 A JP12409575 A JP 12409575A JP 12409575 A JP12409575 A JP 12409575A JP S5247690 A JPS5247690 A JP S5247690A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
wirings
disconnection
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12409575A
Other languages
Japanese (ja)
Inventor
Tsuyoshi Shiragasawa
Tadanaka Yoneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12409575A priority Critical patent/JPS5247690A/en
Publication of JPS5247690A publication Critical patent/JPS5247690A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To fill conductor metal like Al in contact windows by plating method, thereby reducing surface serration at high accuracy and readily preventing the disconnection of vapor-deposited wirings.
COPYRIGHT: (C)1977,JPO&Japio
JP12409575A 1975-10-14 1975-10-14 Process for production of semiconductor device Pending JPS5247690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12409575A JPS5247690A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12409575A JPS5247690A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5247690A true JPS5247690A (en) 1977-04-15

Family

ID=14876787

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12409575A Pending JPS5247690A (en) 1975-10-14 1975-10-14 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5247690A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140870A (en) * 1983-12-28 1985-07-25 Fujitsu Ltd Manufacture of semiconductor device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60140870A (en) * 1983-12-28 1985-07-25 Fujitsu Ltd Manufacture of semiconductor device
JPH049372B2 (en) * 1983-12-28 1992-02-20

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