JPS5324291A - Production of semiconductor devi ce - Google Patents

Production of semiconductor devi ce

Info

Publication number
JPS5324291A
JPS5324291A JP9911176A JP9911176A JPS5324291A JP S5324291 A JPS5324291 A JP S5324291A JP 9911176 A JP9911176 A JP 9911176A JP 9911176 A JP9911176 A JP 9911176A JP S5324291 A JPS5324291 A JP S5324291A
Authority
JP
Japan
Prior art keywords
production
devi
semiconductor
semiconductor devi
utilize
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9911176A
Other languages
Japanese (ja)
Inventor
Kenzo Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP9911176A priority Critical patent/JPS5324291A/en
Publication of JPS5324291A publication Critical patent/JPS5324291A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To work the insulation film over metal wirings at accuracy higher than before by applying plasma etching and to utilize the metal wiring film as an etching end poing.
COPYRIGHT: (C)1978,JPO&Japio
JP9911176A 1976-08-18 1976-08-18 Production of semiconductor devi ce Pending JPS5324291A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9911176A JPS5324291A (en) 1976-08-18 1976-08-18 Production of semiconductor devi ce

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9911176A JPS5324291A (en) 1976-08-18 1976-08-18 Production of semiconductor devi ce

Publications (1)

Publication Number Publication Date
JPS5324291A true JPS5324291A (en) 1978-03-06

Family

ID=14238699

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9911176A Pending JPS5324291A (en) 1976-08-18 1976-08-18 Production of semiconductor devi ce

Country Status (1)

Country Link
JP (1) JPS5324291A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258962A (en) * 1985-04-19 1985-12-20 Hitachi Ltd Solid-state image pickup element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60258962A (en) * 1985-04-19 1985-12-20 Hitachi Ltd Solid-state image pickup element
JPS6329241B2 (en) * 1985-04-19 1988-06-13 Hitachi Ltd

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