JPS5324291A - Production of semiconductor devi ce - Google Patents
Production of semiconductor devi ceInfo
- Publication number
- JPS5324291A JPS5324291A JP9911176A JP9911176A JPS5324291A JP S5324291 A JPS5324291 A JP S5324291A JP 9911176 A JP9911176 A JP 9911176A JP 9911176 A JP9911176 A JP 9911176A JP S5324291 A JPS5324291 A JP S5324291A
- Authority
- JP
- Japan
- Prior art keywords
- production
- devi
- semiconductor
- semiconductor devi
- utilize
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To work the insulation film over metal wirings at accuracy higher than before by applying plasma etching and to utilize the metal wiring film as an etching end poing.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9911176A JPS5324291A (en) | 1976-08-18 | 1976-08-18 | Production of semiconductor devi ce |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9911176A JPS5324291A (en) | 1976-08-18 | 1976-08-18 | Production of semiconductor devi ce |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5324291A true JPS5324291A (en) | 1978-03-06 |
Family
ID=14238699
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9911176A Pending JPS5324291A (en) | 1976-08-18 | 1976-08-18 | Production of semiconductor devi ce |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5324291A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60258962A (en) * | 1985-04-19 | 1985-12-20 | Hitachi Ltd | Solid-state image pickup element |
-
1976
- 1976-08-18 JP JP9911176A patent/JPS5324291A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60258962A (en) * | 1985-04-19 | 1985-12-20 | Hitachi Ltd | Solid-state image pickup element |
JPS6329241B2 (en) * | 1985-04-19 | 1988-06-13 | Hitachi Ltd |
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