JPS51113571A - Precision processing method of semi-conductor - Google Patents
Precision processing method of semi-conductorInfo
- Publication number
- JPS51113571A JPS51113571A JP3789975A JP3789975A JPS51113571A JP S51113571 A JPS51113571 A JP S51113571A JP 3789975 A JP3789975 A JP 3789975A JP 3789975 A JP3789975 A JP 3789975A JP S51113571 A JPS51113571 A JP S51113571A
- Authority
- JP
- Japan
- Prior art keywords
- semi
- conductor
- processing method
- precision processing
- precision
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: Method to do the extremely high precision etching on compound semi-conductors.
COPYRIGHT: (C)1976,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3789975A JPS51113571A (en) | 1975-03-31 | 1975-03-31 | Precision processing method of semi-conductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3789975A JPS51113571A (en) | 1975-03-31 | 1975-03-31 | Precision processing method of semi-conductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS51113571A true JPS51113571A (en) | 1976-10-06 |
Family
ID=12510375
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3789975A Pending JPS51113571A (en) | 1975-03-31 | 1975-03-31 | Precision processing method of semi-conductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51113571A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522868A (en) * | 1978-08-08 | 1980-02-18 | Fujitsu Ltd | Removing method for semiconductor crystal break-down layer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866540A (en) * | 1971-12-13 | 1973-09-12 |
-
1975
- 1975-03-31 JP JP3789975A patent/JPS51113571A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4866540A (en) * | 1971-12-13 | 1973-09-12 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5522868A (en) * | 1978-08-08 | 1980-02-18 | Fujitsu Ltd | Removing method for semiconductor crystal break-down layer |
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