JPS51113571A - Precision processing method of semi-conductor - Google Patents

Precision processing method of semi-conductor

Info

Publication number
JPS51113571A
JPS51113571A JP3789975A JP3789975A JPS51113571A JP S51113571 A JPS51113571 A JP S51113571A JP 3789975 A JP3789975 A JP 3789975A JP 3789975 A JP3789975 A JP 3789975A JP S51113571 A JPS51113571 A JP S51113571A
Authority
JP
Japan
Prior art keywords
semi
conductor
processing method
precision processing
precision
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3789975A
Other languages
Japanese (ja)
Inventor
Masayasu Ando
Masaaki Sakuta
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP3789975A priority Critical patent/JPS51113571A/en
Publication of JPS51113571A publication Critical patent/JPS51113571A/en
Pending legal-status Critical Current

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  • Weting (AREA)

Abstract

PURPOSE: Method to do the extremely high precision etching on compound semi-conductors.
COPYRIGHT: (C)1976,JPO&Japio
JP3789975A 1975-03-31 1975-03-31 Precision processing method of semi-conductor Pending JPS51113571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3789975A JPS51113571A (en) 1975-03-31 1975-03-31 Precision processing method of semi-conductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3789975A JPS51113571A (en) 1975-03-31 1975-03-31 Precision processing method of semi-conductor

Publications (1)

Publication Number Publication Date
JPS51113571A true JPS51113571A (en) 1976-10-06

Family

ID=12510375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3789975A Pending JPS51113571A (en) 1975-03-31 1975-03-31 Precision processing method of semi-conductor

Country Status (1)

Country Link
JP (1) JPS51113571A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522868A (en) * 1978-08-08 1980-02-18 Fujitsu Ltd Removing method for semiconductor crystal break-down layer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866540A (en) * 1971-12-13 1973-09-12

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4866540A (en) * 1971-12-13 1973-09-12

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5522868A (en) * 1978-08-08 1980-02-18 Fujitsu Ltd Removing method for semiconductor crystal break-down layer

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