JPS51136289A - Semi-conductor producing - Google Patents

Semi-conductor producing

Info

Publication number
JPS51136289A
JPS51136289A JP5965675A JP5965675A JPS51136289A JP S51136289 A JPS51136289 A JP S51136289A JP 5965675 A JP5965675 A JP 5965675A JP 5965675 A JP5965675 A JP 5965675A JP S51136289 A JPS51136289 A JP S51136289A
Authority
JP
Japan
Prior art keywords
semi
conductor producing
conductor
producing
multiply
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5965675A
Other languages
Japanese (ja)
Inventor
Yoshiaki Inoue
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5965675A priority Critical patent/JPS51136289A/en
Publication of JPS51136289A publication Critical patent/JPS51136289A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)

Abstract

PURPOSE: Etching for side etch prevention of multiply grown oxide film and pattern accuracy improving.
COPYRIGHT: (C)1976,JPO&Japio
JP5965675A 1975-05-21 1975-05-21 Semi-conductor producing Pending JPS51136289A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5965675A JPS51136289A (en) 1975-05-21 1975-05-21 Semi-conductor producing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5965675A JPS51136289A (en) 1975-05-21 1975-05-21 Semi-conductor producing

Publications (1)

Publication Number Publication Date
JPS51136289A true JPS51136289A (en) 1976-11-25

Family

ID=13119451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5965675A Pending JPS51136289A (en) 1975-05-21 1975-05-21 Semi-conductor producing

Country Status (1)

Country Link
JP (1) JPS51136289A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513964A (en) * 1978-07-17 1980-01-31 Nec Corp Method of manufacturing semiconductor device
JPS5679434A (en) * 1979-11-30 1981-06-30 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS5683035A (en) * 1979-12-11 1981-07-07 Sanyo Electric Co Ltd Manufacture of semiconductor device
JPS598357A (en) * 1982-07-06 1984-01-17 Mitsubishi Electric Corp Formation of contact hole in semiconductor device
JPS60246640A (en) * 1984-05-22 1985-12-06 Seiko Instr & Electronics Ltd Manufacture of semiconductor device
JPH04257222A (en) * 1991-02-12 1992-09-11 Fujitsu Ltd Manufacture of semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5513964A (en) * 1978-07-17 1980-01-31 Nec Corp Method of manufacturing semiconductor device
JPS5679434A (en) * 1979-11-30 1981-06-30 Nec Home Electronics Ltd Manufacture of semiconductor device
JPS5683035A (en) * 1979-12-11 1981-07-07 Sanyo Electric Co Ltd Manufacture of semiconductor device
JPS598357A (en) * 1982-07-06 1984-01-17 Mitsubishi Electric Corp Formation of contact hole in semiconductor device
JPS60246640A (en) * 1984-05-22 1985-12-06 Seiko Instr & Electronics Ltd Manufacture of semiconductor device
JPH04257222A (en) * 1991-02-12 1992-09-11 Fujitsu Ltd Manufacture of semiconductor device

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