JPS5340282A - Manufacture of semiconductor unit - Google Patents
Manufacture of semiconductor unitInfo
- Publication number
- JPS5340282A JPS5340282A JP11500676A JP11500676A JPS5340282A JP S5340282 A JPS5340282 A JP S5340282A JP 11500676 A JP11500676 A JP 11500676A JP 11500676 A JP11500676 A JP 11500676A JP S5340282 A JPS5340282 A JP S5340282A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- etching
- semiconductor unit
- resist material
- processed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Abstract
PURPOSE: The resist material of the prescribed pattern is provided onto a processed substrate, and with this material taken as a mask, the selective etching is done halfway; and after the region which has been etched again is covered with the resist material heat-processed and softened or fused, the etching is carried on again, thereby improving the etching precision.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11500676A JPS5340282A (en) | 1976-09-25 | 1976-09-25 | Manufacture of semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11500676A JPS5340282A (en) | 1976-09-25 | 1976-09-25 | Manufacture of semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5340282A true JPS5340282A (en) | 1978-04-12 |
Family
ID=14651946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11500676A Pending JPS5340282A (en) | 1976-09-25 | 1976-09-25 | Manufacture of semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5340282A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54159184A (en) * | 1978-06-07 | 1979-12-15 | Toshiba Corp | Insulation gate type field effect transistor and its manufacture |
JPS54162972A (en) * | 1978-06-15 | 1979-12-25 | Toshiba Corp | Insulated gate type field effect transistor and its manufacture |
-
1976
- 1976-09-25 JP JP11500676A patent/JPS5340282A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54159184A (en) * | 1978-06-07 | 1979-12-15 | Toshiba Corp | Insulation gate type field effect transistor and its manufacture |
JPS54162972A (en) * | 1978-06-15 | 1979-12-25 | Toshiba Corp | Insulated gate type field effect transistor and its manufacture |
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