JPS5340282A - Manufacture of semiconductor unit - Google Patents

Manufacture of semiconductor unit

Info

Publication number
JPS5340282A
JPS5340282A JP11500676A JP11500676A JPS5340282A JP S5340282 A JPS5340282 A JP S5340282A JP 11500676 A JP11500676 A JP 11500676A JP 11500676 A JP11500676 A JP 11500676A JP S5340282 A JPS5340282 A JP S5340282A
Authority
JP
Japan
Prior art keywords
manufacture
etching
semiconductor unit
resist material
processed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11500676A
Other languages
Japanese (ja)
Inventor
Kazushi Nagata
Kazuto Suehiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11500676A priority Critical patent/JPS5340282A/en
Publication of JPS5340282A publication Critical patent/JPS5340282A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)

Abstract

PURPOSE: The resist material of the prescribed pattern is provided onto a processed substrate, and with this material taken as a mask, the selective etching is done halfway; and after the region which has been etched again is covered with the resist material heat-processed and softened or fused, the etching is carried on again, thereby improving the etching precision.
COPYRIGHT: (C)1978,JPO&Japio
JP11500676A 1976-09-25 1976-09-25 Manufacture of semiconductor unit Pending JPS5340282A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11500676A JPS5340282A (en) 1976-09-25 1976-09-25 Manufacture of semiconductor unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11500676A JPS5340282A (en) 1976-09-25 1976-09-25 Manufacture of semiconductor unit

Publications (1)

Publication Number Publication Date
JPS5340282A true JPS5340282A (en) 1978-04-12

Family

ID=14651946

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11500676A Pending JPS5340282A (en) 1976-09-25 1976-09-25 Manufacture of semiconductor unit

Country Status (1)

Country Link
JP (1) JPS5340282A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159184A (en) * 1978-06-07 1979-12-15 Toshiba Corp Insulation gate type field effect transistor and its manufacture
JPS54162972A (en) * 1978-06-15 1979-12-25 Toshiba Corp Insulated gate type field effect transistor and its manufacture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54159184A (en) * 1978-06-07 1979-12-15 Toshiba Corp Insulation gate type field effect transistor and its manufacture
JPS54162972A (en) * 1978-06-15 1979-12-25 Toshiba Corp Insulated gate type field effect transistor and its manufacture

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