JPS5380167A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5380167A
JPS5380167A JP15724376A JP15724376A JPS5380167A JP S5380167 A JPS5380167 A JP S5380167A JP 15724376 A JP15724376 A JP 15724376A JP 15724376 A JP15724376 A JP 15724376A JP S5380167 A JPS5380167 A JP S5380167A
Authority
JP
Japan
Prior art keywords
semiconductor device
manufacture
insulating film
mask
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15724376A
Other languages
Japanese (ja)
Inventor
Yoshihiko Hirose
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP15724376A priority Critical patent/JPS5380167A/en
Publication of JPS5380167A publication Critical patent/JPS5380167A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The pattern mask of a metal oxidized film provided to the insulating film formed on a semiconductor substrate surface is used for etching the insulating film to form the imsulating film mask of the fine pattern, so that the high frequency characteristics of the fabricated semiconductor device will be improved.
COPYRIGHT: (C)1978,JPO&Japio
JP15724376A 1976-12-24 1976-12-24 Manufacture of semiconductor device Pending JPS5380167A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15724376A JPS5380167A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15724376A JPS5380167A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5380167A true JPS5380167A (en) 1978-07-15

Family

ID=15645365

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15724376A Pending JPS5380167A (en) 1976-12-24 1976-12-24 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5380167A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142140A (en) * 1984-07-30 1986-02-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming self-aligning structure
CN103700765A (en) * 2012-09-27 2014-04-02 国际商业机器公司 Manufacturing method and semiconductor device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6142140A (en) * 1984-07-30 1986-02-28 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション Method of forming self-aligning structure
JPH0466099B2 (en) * 1984-07-30 1992-10-22 Intaanashonaru Bijinesu Mashiinzu Corp
CN103700765A (en) * 2012-09-27 2014-04-02 国际商业机器公司 Manufacturing method and semiconductor device

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