JPS5272571A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5272571A
JPS5272571A JP14984375A JP14984375A JPS5272571A JP S5272571 A JPS5272571 A JP S5272571A JP 14984375 A JP14984375 A JP 14984375A JP 14984375 A JP14984375 A JP 14984375A JP S5272571 A JPS5272571 A JP S5272571A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
layer
resin
patterning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14984375A
Other languages
Japanese (ja)
Inventor
Masanao Itoga
Yorihiro Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14984375A priority Critical patent/JPS5272571A/en
Publication of JPS5272571A publication Critical patent/JPS5272571A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make possible the stable formation of fine metal wirings by patterning a metal layer for mask and a spacer layer laminated with a resin layer composed of a silicon resin on the insulating layer formed on a semiconductor substrate.
COPYRIGHT: (C)1977,JPO&Japio
JP14984375A 1975-12-15 1975-12-15 Production of semiconductor device Pending JPS5272571A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14984375A JPS5272571A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14984375A JPS5272571A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5272571A true JPS5272571A (en) 1977-06-17

Family

ID=15483858

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14984375A Pending JPS5272571A (en) 1975-12-15 1975-12-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5272571A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295987A (en) * 1976-02-06 1977-08-12 Ibm Method of producing device with flat surface
JPS57176769A (en) * 1981-04-21 1982-10-30 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof
JPS6113619A (en) * 1984-06-29 1986-01-21 Agency Of Ind Science & Technol Manufacture of semiconductor device
WO2009034926A1 (en) * 2007-09-11 2009-03-19 National University Corporation Tohoku University Method for manufacturing electronic device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5295987A (en) * 1976-02-06 1977-08-12 Ibm Method of producing device with flat surface
JPS5827664B2 (en) * 1976-02-06 1983-06-10 Intaanashonaru Bijinesu Mashiinzu Corp
JPS57176769A (en) * 1981-04-21 1982-10-30 Nippon Telegr & Teleph Corp <Ntt> Semiconductor device and manufacture thereof
JPS6113619A (en) * 1984-06-29 1986-01-21 Agency Of Ind Science & Technol Manufacture of semiconductor device
WO2009034926A1 (en) * 2007-09-11 2009-03-19 National University Corporation Tohoku University Method for manufacturing electronic device
JP5354383B2 (en) * 2007-09-11 2013-11-27 国立大学法人東北大学 Manufacturing method of electronic device

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