JPS5271978A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5271978A
JPS5271978A JP14798775A JP14798775A JPS5271978A JP S5271978 A JPS5271978 A JP S5271978A JP 14798775 A JP14798775 A JP 14798775A JP 14798775 A JP14798775 A JP 14798775A JP S5271978 A JPS5271978 A JP S5271978A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
photo resist
resist film
portions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14798775A
Other languages
Japanese (ja)
Inventor
Kiyoto Iida
Takashi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP14798775A priority Critical patent/JPS5271978A/en
Publication of JPS5271978A publication Critical patent/JPS5271978A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To discontinuously isolate the required portions and unrequired portions of the electrode wiring formed and obtain good wiring patterns by making a second photo resist film in a structure wherein it overhangs from the end of a metal or metal oxide film and a first photo resist film.
COPYRIGHT: (C)1977,JPO&Japio
JP14798775A 1975-12-11 1975-12-11 Production of semiconductor device Pending JPS5271978A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14798775A JPS5271978A (en) 1975-12-11 1975-12-11 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14798775A JPS5271978A (en) 1975-12-11 1975-12-11 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5271978A true JPS5271978A (en) 1977-06-15

Family

ID=15442590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14798775A Pending JPS5271978A (en) 1975-12-11 1975-12-11 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5271978A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147063A (en) * 1976-06-02 1977-12-07 Toshiba Corp Semiconductor electrode forming method
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS5749230A (en) * 1980-09-08 1982-03-23 Matsushita Electronics Corp Forming method for electrode
US5185277A (en) * 1990-06-12 1993-02-09 Thomson Composants Microondes Method for the making of a transistor gate

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52147063A (en) * 1976-06-02 1977-12-07 Toshiba Corp Semiconductor electrode forming method
JPS5510973B2 (en) * 1976-06-02 1980-03-21
JPS55125627A (en) * 1979-03-22 1980-09-27 Hitachi Ltd Formation of electrode for semiconductor device
JPS5749230A (en) * 1980-09-08 1982-03-23 Matsushita Electronics Corp Forming method for electrode
US5185277A (en) * 1990-06-12 1993-02-09 Thomson Composants Microondes Method for the making of a transistor gate

Similar Documents

Publication Publication Date Title
JPS5271978A (en) Production of semiconductor device
JPS5363871A (en) Production of semiconductor device
JPS5272571A (en) Production of semiconductor device
JPS52153383A (en) Preparation of semiconductor device
JPS5419367A (en) Production of semiconductor device
JPS5240061A (en) Semiconductor device and process for production of same
JPS5251872A (en) Production of semiconductor device
JPS52150983A (en) Production of semiconductor device
JPS5211772A (en) Semiconductor device
JPS5377168A (en) Production of semiconductor device
JPS52147084A (en) Production of semiconductor device
JPS5271993A (en) Production of semiconductor integrated circuit device
JPS51151089A (en) Manufacturing method of a semiconductor
JPS5363866A (en) Production of semiconductor device
JPS52135689A (en) Production of semiconductor device
JPS542666A (en) Manufacture of semiconductor device
JPS52143767A (en) Production of semiconductor device
JPS53124993A (en) Production of semiconductor device
JPS5361968A (en) Production of semiconductor device
JPS522293A (en) Method of formig wiring layer
JPS5283063A (en) Production of semiconductor device
JPS5315788A (en) Production of semiconductor device
JPS5260083A (en) Production of semiconductor device
JPS5271986A (en) Beam lead type semiconductor device
JPS5435683A (en) Manufacture of semiconductor device