JPS5315788A - Production of semiconductor device - Google Patents
Production of semiconductor deviceInfo
- Publication number
- JPS5315788A JPS5315788A JP9055076A JP9055076A JPS5315788A JP S5315788 A JPS5315788 A JP S5315788A JP 9055076 A JP9055076 A JP 9055076A JP 9055076 A JP9055076 A JP 9055076A JP S5315788 A JPS5315788 A JP S5315788A
- Authority
- JP
- Japan
- Prior art keywords
- elements
- production
- semiconductor device
- make
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To make isolation among elements perfect and prevent disconnection by perfectly oxidizing the exposed portions of a semiconductor substrate to increase their volume and make the substrate flush to element forming regions, then forming elements and performing wirings among elements through the oxidized surface.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9055076A JPS5315788A (en) | 1976-07-28 | 1976-07-28 | Production of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9055076A JPS5315788A (en) | 1976-07-28 | 1976-07-28 | Production of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5315788A true JPS5315788A (en) | 1978-02-14 |
Family
ID=14001511
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9055076A Pending JPS5315788A (en) | 1976-07-28 | 1976-07-28 | Production of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5315788A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5754346A (en) * | 1980-09-18 | 1982-03-31 | Matsushita Electronics Corp | Formation of polycrystalline silicon wiring layer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135586A (en) * | 1973-04-28 | 1974-12-27 |
-
1976
- 1976-07-28 JP JP9055076A patent/JPS5315788A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49135586A (en) * | 1973-04-28 | 1974-12-27 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5754346A (en) * | 1980-09-18 | 1982-03-31 | Matsushita Electronics Corp | Formation of polycrystalline silicon wiring layer |
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