JPS5338992A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5338992A
JPS5338992A JP11308276A JP11308276A JPS5338992A JP S5338992 A JPS5338992 A JP S5338992A JP 11308276 A JP11308276 A JP 11308276A JP 11308276 A JP11308276 A JP 11308276A JP S5338992 A JPS5338992 A JP S5338992A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
layer wiring
foundation film
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11308276A
Other languages
Japanese (ja)
Inventor
Kaoru Niino
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11308276A priority Critical patent/JPS5338992A/en
Publication of JPS5338992A publication Critical patent/JPS5338992A/en
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To avoid the stage difference occurrence between the wiring layers and thus to secure a highly reliable multi-layer wiring with no disconnection by using the poly crystal Si for the foundation film of the multi-layer wiring and then turning the foundation film into low resistance selectively.
COPYRIGHT: (C)1978,JPO&Japio
JP11308276A 1976-09-22 1976-09-22 Manufacture of semiconductor device Pending JPS5338992A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11308276A JPS5338992A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11308276A JPS5338992A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5338992A true JPS5338992A (en) 1978-04-10

Family

ID=14603016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11308276A Pending JPS5338992A (en) 1976-09-22 1976-09-22 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5338992A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596653A (en) * 1979-01-15 1980-07-23 Philips Nv Semiconductor device and method of fabricating same
JPS55158667A (en) * 1979-05-29 1980-12-10 Shindengen Electric Mfg Co Ltd Silicon transistor
JPS6097669A (en) * 1983-11-02 1985-05-31 Hitachi Ltd Semiconductor integrated circuit device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596653A (en) * 1979-01-15 1980-07-23 Philips Nv Semiconductor device and method of fabricating same
JPS55158667A (en) * 1979-05-29 1980-12-10 Shindengen Electric Mfg Co Ltd Silicon transistor
JPS6097669A (en) * 1983-11-02 1985-05-31 Hitachi Ltd Semiconductor integrated circuit device

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