JPS52114287A - Semiconductor device having multilayer wiring structure - Google Patents

Semiconductor device having multilayer wiring structure

Info

Publication number
JPS52114287A
JPS52114287A JP3104776A JP3104776A JPS52114287A JP S52114287 A JPS52114287 A JP S52114287A JP 3104776 A JP3104776 A JP 3104776A JP 3104776 A JP3104776 A JP 3104776A JP S52114287 A JPS52114287 A JP S52114287A
Authority
JP
Japan
Prior art keywords
semiconductor
multilayer wiring
forming
layers
pure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3104776A
Other languages
Japanese (ja)
Inventor
Yoshinori Yukimoto
Yukio Higaki
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP3104776A priority Critical patent/JPS52114287A/en
Publication of JPS52114287A publication Critical patent/JPS52114287A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make mutual connection of multilayer wirings reliable by forming one of first and second wiring layers which are mutually connected through the holes in the insulating film held between layers using pure Al, and forming the other with Al containing at least more than 1wt% of Si.
COPYRIGHT: (C)1977,JPO&Japio
JP3104776A 1976-03-22 1976-03-22 Semiconductor device having multilayer wiring structure Pending JPS52114287A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3104776A JPS52114287A (en) 1976-03-22 1976-03-22 Semiconductor device having multilayer wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3104776A JPS52114287A (en) 1976-03-22 1976-03-22 Semiconductor device having multilayer wiring structure

Publications (1)

Publication Number Publication Date
JPS52114287A true JPS52114287A (en) 1977-09-24

Family

ID=12320556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3104776A Pending JPS52114287A (en) 1976-03-22 1976-03-22 Semiconductor device having multilayer wiring structure

Country Status (1)

Country Link
JP (1) JPS52114287A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6462729B2 (en) * 1992-06-30 2002-10-08 Sony Corporation Search and display apparatus

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112292A (en) * 1975-03-28 1976-10-04 Hitachi Ltd Semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51112292A (en) * 1975-03-28 1976-10-04 Hitachi Ltd Semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6462729B2 (en) * 1992-06-30 2002-10-08 Sony Corporation Search and display apparatus

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