JPS5360586A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS5360586A JPS5360586A JP13572576A JP13572576A JPS5360586A JP S5360586 A JPS5360586 A JP S5360586A JP 13572576 A JP13572576 A JP 13572576A JP 13572576 A JP13572576 A JP 13572576A JP S5360586 A JPS5360586 A JP S5360586A
- Authority
- JP
- Japan
- Prior art keywords
- insulation film
- layer wiring
- semiconductor device
- parts
- burying
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To obtain multilayer wirings free from any fear for disconnection by burying the lateral stepping parts of the first insulation film covering first layer wiring with polyimide resin to make said parts mild and forming second layer wiring through a second insulation film over this.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13572576A JPS5360586A (en) | 1976-11-11 | 1976-11-11 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13572576A JPS5360586A (en) | 1976-11-11 | 1976-11-11 | Semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5360586A true JPS5360586A (en) | 1978-05-31 |
JPS6118341B2 JPS6118341B2 (en) | 1986-05-12 |
Family
ID=15158412
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13572576A Granted JPS5360586A (en) | 1976-11-11 | 1976-11-11 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5360586A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5922332A (en) * | 1982-07-28 | 1984-02-04 | Matsushita Electronics Corp | Semiconductor device |
JPH0393253A (en) * | 1989-08-31 | 1991-04-18 | Delco Electron Corp | Integrated circuit and method of manufacturing the same |
-
1976
- 1976-11-11 JP JP13572576A patent/JPS5360586A/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5922332A (en) * | 1982-07-28 | 1984-02-04 | Matsushita Electronics Corp | Semiconductor device |
JPH0393253A (en) * | 1989-08-31 | 1991-04-18 | Delco Electron Corp | Integrated circuit and method of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6118341B2 (en) | 1986-05-12 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5365088A (en) | Semiconductor device | |
JPS5211767A (en) | Semiconductor device | |
JPS5360586A (en) | Semiconductor device | |
JPS5321584A (en) | Wiring system of semiconductor device | |
JPS5397789A (en) | Semiconductor device | |
JPS5214381A (en) | Mis-type semiconductor device | |
JPS5420681A (en) | Semiconductor device | |
JPS52102691A (en) | Formation of wiring on insulating layer having steps | |
JPS5329087A (en) | Semiconductor device | |
JPS5338992A (en) | Manufacture of semiconductor device | |
JPS539470A (en) | Semiconductor device | |
JPS5279888A (en) | Semiconductor device | |
JPS52114287A (en) | Semiconductor device having multilayer wiring structure | |
JPS5240085A (en) | Semiconductor device | |
JPS5329088A (en) | Production of semiconductor integrated circuit device | |
JPS53112688A (en) | Manufacture for semiconductor device | |
JPS52131455A (en) | Semiconductor device | |
JPS52150966A (en) | Semiconductor device | |
JPS5326672A (en) | Semi conductor device | |
JPS5321569A (en) | Production of semiconductor device | |
JPS5312285A (en) | Semiconductor ingegrated circuit device | |
JPS5435690A (en) | Manufacture of semiconductor device of multilayer wiring type | |
JPS5289467A (en) | Semiconductor device | |
JPS52125285A (en) | Semiconductor device | |
JPS5421290A (en) | Integrated circuit device and its manufacture |