JPS5421290A - Integrated circuit device and its manufacture - Google Patents

Integrated circuit device and its manufacture

Info

Publication number
JPS5421290A
JPS5421290A JP8682377A JP8682377A JPS5421290A JP S5421290 A JPS5421290 A JP S5421290A JP 8682377 A JP8682377 A JP 8682377A JP 8682377 A JP8682377 A JP 8682377A JP S5421290 A JPS5421290 A JP S5421290A
Authority
JP
Japan
Prior art keywords
integrated circuit
circuit device
manufacture
wiring
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8682377A
Other languages
Japanese (ja)
Inventor
Makoto Uehara
Katsumi Minazu
Mineto Tobinaga
Takaaki Katou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP8682377A priority Critical patent/JPS5421290A/en
Publication of JPS5421290A publication Critical patent/JPS5421290A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To form wiring layer easily without adding special processes, by forming the insulation and wiring layers with a specific method by use of a specific material, in an integrated circuit device providing multi-layer wiring.
COPYRIGHT: (C)1979,JPO&Japio
JP8682377A 1977-07-19 1977-07-19 Integrated circuit device and its manufacture Pending JPS5421290A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8682377A JPS5421290A (en) 1977-07-19 1977-07-19 Integrated circuit device and its manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8682377A JPS5421290A (en) 1977-07-19 1977-07-19 Integrated circuit device and its manufacture

Publications (1)

Publication Number Publication Date
JPS5421290A true JPS5421290A (en) 1979-02-17

Family

ID=13897520

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8682377A Pending JPS5421290A (en) 1977-07-19 1977-07-19 Integrated circuit device and its manufacture

Country Status (1)

Country Link
JP (1) JPS5421290A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376459A (en) * 1986-09-15 1988-04-06 ワトキンズ‐ジョンソン　コムパニー Boron silicate glass film for multilayer metallic structure in semiconductor device and manufacture of the same
JP2022019819A (en) * 2005-06-24 2022-01-27 クゥアルコム・インコーポレイテッド Method of manufacturing circuitry device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011793A (en) * 1973-06-04 1975-02-06
JPS5081079A (en) * 1973-11-16 1975-07-01
JPS5115979A (en) * 1974-07-31 1976-02-07 Hitachi Ltd HANDOTAISOCHINODENKYOKUKEISEIHO

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011793A (en) * 1973-06-04 1975-02-06
JPS5081079A (en) * 1973-11-16 1975-07-01
JPS5115979A (en) * 1974-07-31 1976-02-07 Hitachi Ltd HANDOTAISOCHINODENKYOKUKEISEIHO

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6376459A (en) * 1986-09-15 1988-04-06 ワトキンズ‐ジョンソン　コムパニー Boron silicate glass film for multilayer metallic structure in semiconductor device and manufacture of the same
JP2022019819A (en) * 2005-06-24 2022-01-27 クゥアルコム・インコーポレイテッド Method of manufacturing circuitry device

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