JPS542667A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS542667A
JPS542667A JP6748577A JP6748577A JPS542667A JP S542667 A JPS542667 A JP S542667A JP 6748577 A JP6748577 A JP 6748577A JP 6748577 A JP6748577 A JP 6748577A JP S542667 A JPS542667 A JP S542667A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
protective layer
polybutadiene resin
insulation layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6748577A
Other languages
Japanese (ja)
Inventor
Shiro Takeda
Yuji Nagai
Minoru Nakajima
Takenori Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP6748577A priority Critical patent/JPS542667A/en
Publication of JPS542667A publication Critical patent/JPS542667A/en
Pending legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To manufacture a semiconductor device leaving polybutadiene resin, used as a resist during its manufacture, as an insulation layer and protective layer.
COPYRIGHT: (C)1979,JPO&Japio
JP6748577A 1977-06-08 1977-06-08 Manufacture of semiconductor device Pending JPS542667A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6748577A JPS542667A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6748577A JPS542667A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS542667A true JPS542667A (en) 1979-01-10

Family

ID=13346318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6748577A Pending JPS542667A (en) 1977-06-08 1977-06-08 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS542667A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134159A (en) * 1982-01-29 1983-08-10 ピーピージー・インダストリーズ・インコーポレイテッド Elastomer coating composition
EP0502614A2 (en) * 1991-02-07 1992-09-09 Fujitsu Limited Thin film circuit substrate and processes for its manufacture
US6295630B1 (en) 1998-07-28 2001-09-25 Nec Corporation Method and apparatus for measuring an overlap length of MISFET, and a recording medium and a device model each carrying an extraction program for determining the overlap length

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58134159A (en) * 1982-01-29 1983-08-10 ピーピージー・インダストリーズ・インコーポレイテッド Elastomer coating composition
JPH0525916B2 (en) * 1982-01-29 1993-04-14 Ppg Industries Inc
EP0502614A2 (en) * 1991-02-07 1992-09-09 Fujitsu Limited Thin film circuit substrate and processes for its manufacture
US6110568A (en) * 1991-02-07 2000-08-29 Fujitsu Limited Thin film circuit substrate and process for the manufacture thereof
US6295630B1 (en) 1998-07-28 2001-09-25 Nec Corporation Method and apparatus for measuring an overlap length of MISFET, and a recording medium and a device model each carrying an extraction program for determining the overlap length

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