JPS52128063A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS52128063A
JPS52128063A JP4566876A JP4566876A JPS52128063A JP S52128063 A JPS52128063 A JP S52128063A JP 4566876 A JP4566876 A JP 4566876A JP 4566876 A JP4566876 A JP 4566876A JP S52128063 A JPS52128063 A JP S52128063A
Authority
JP
Japan
Prior art keywords
semiconductor
layer
manufacture
epitaxial
growing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4566876A
Other languages
Japanese (ja)
Inventor
Hisao Kumabe
Mutsuyuki Otsubo
Hidejiro Miki
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP4566876A priority Critical patent/JPS52128063A/en
Publication of JPS52128063A publication Critical patent/JPS52128063A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To obtain a good property semiconductor device easily by epitaxial-growing semiinsulating semiconductor layer on the semiconductor active layer and by using the semiconductor layer for the insulation protection layer.
COPYRIGHT: (C)1977,JPO&Japio
JP4566876A 1976-04-21 1976-04-21 Manufacture of semiconductor device Pending JPS52128063A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4566876A JPS52128063A (en) 1976-04-21 1976-04-21 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4566876A JPS52128063A (en) 1976-04-21 1976-04-21 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52128063A true JPS52128063A (en) 1977-10-27

Family

ID=12725755

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4566876A Pending JPS52128063A (en) 1976-04-21 1976-04-21 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52128063A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481074A (en) * 1977-12-12 1979-06-28 Fujitsu Ltd Semiconductor device
JPS57196582A (en) * 1981-05-27 1982-12-02 Matsushita Electric Ind Co Ltd Field-effect transistor
JPS57198664A (en) * 1981-06-01 1982-12-06 Nec Corp Semiconductor device
JPS58166832U (en) * 1982-04-28 1983-11-07
JPS59172777A (en) * 1983-03-23 1984-09-29 Oki Electric Ind Co Ltd Semiconductor device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836984A (en) * 1971-09-11 1973-05-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4836984A (en) * 1971-09-11 1973-05-31

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5481074A (en) * 1977-12-12 1979-06-28 Fujitsu Ltd Semiconductor device
JPS57196582A (en) * 1981-05-27 1982-12-02 Matsushita Electric Ind Co Ltd Field-effect transistor
JPS57198664A (en) * 1981-06-01 1982-12-06 Nec Corp Semiconductor device
JPS58166832U (en) * 1982-04-28 1983-11-07
JPS59172777A (en) * 1983-03-23 1984-09-29 Oki Electric Ind Co Ltd Semiconductor device

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