JPS5365088A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS5365088A
JPS5365088A JP14085476A JP14085476A JPS5365088A JP S5365088 A JPS5365088 A JP S5365088A JP 14085476 A JP14085476 A JP 14085476A JP 14085476 A JP14085476 A JP 14085476A JP S5365088 A JPS5365088 A JP S5365088A
Authority
JP
Japan
Prior art keywords
film
layer
wiring paths
layer wiring
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14085476A
Other languages
Japanese (ja)
Other versions
JPS5742220B2 (en
Inventor
Masaharu Yorikane
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP14085476A priority Critical patent/JPS5742220B2/ja
Publication of JPS5365088A publication Critical patent/JPS5365088A/en
Publication of JPS5742220B2 publication Critical patent/JPS5742220B2/ja
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To obtain high-density fine multilayer wiring s of high reliability by depositing a Ti film on the A film forming first layer wiring paths, thereafter converting the A film surface to an acid-resistant high-mechanical-strength layer through heat treatment in a low temperature N2 atmosphere and providing second layer wiring paths of Ti and A thereon via insulation film.
COPYRIGHT: (C)1978,JPO&Japio
JP14085476A 1976-11-22 1976-11-22 Expired JPS5742220B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14085476A JPS5742220B2 (en) 1976-11-22 1976-11-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14085476A JPS5742220B2 (en) 1976-11-22 1976-11-22

Publications (2)

Publication Number Publication Date
JPS5365088A true JPS5365088A (en) 1978-06-10
JPS5742220B2 JPS5742220B2 (en) 1982-09-07

Family

ID=15278274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14085476A Expired JPS5742220B2 (en) 1976-11-22 1976-11-22

Country Status (1)

Country Link
JP (1) JPS5742220B2 (en)

Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5524454A (en) * 1978-08-08 1980-02-21 Nec Corp Insulating gate type field effect transistor
JPS5530876A (en) * 1978-08-28 1980-03-04 Fuji Electric Co Ltd Semiconductor device
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPS56130948A (en) * 1980-03-18 1981-10-14 Nec Corp Semiconductor device
JPS5720452A (en) * 1980-07-11 1982-02-02 Matsushita Electric Ind Co Ltd Forming method for multilayer wiring
JPS5748249A (en) * 1980-09-08 1982-03-19 Nec Corp Semiconductor device
JPS57149751A (en) * 1981-03-11 1982-09-16 Nec Corp Semiconductor device
JPS57208160A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS57208161A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS58500680A (en) * 1981-05-04 1983-04-28
JPS6037745A (en) * 1983-08-10 1985-02-27 Seiko Epson Corp Semiconductor device
JPS6154648A (en) * 1984-08-24 1986-03-18 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS61152042A (en) * 1984-12-20 1986-07-10 Sgs Microelettronica Spa Metalization pattern of semiconductor element and method thereof
JPS61159750A (en) * 1984-12-31 1986-07-19 Sony Corp Semiconductor device and manufacture thereof
JPS61183942A (en) * 1985-02-08 1986-08-16 Fujitsu Ltd Manufacture of semiconductor device
JPS6260240A (en) * 1985-09-10 1987-03-16 Matsushita Electric Ind Co Ltd Multilayer interconnection
JPS62118546A (en) * 1985-11-19 1987-05-29 Mitsubishi Electric Corp Semiconductor device
JPS63198357A (en) * 1987-02-13 1988-08-17 Nec Corp Semiconductor device
JPS6465856A (en) * 1987-09-05 1989-03-13 Fujitsu Ltd Semiconductor device and manufacture thereof

Cited By (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6327864B2 (en) * 1978-08-08 1988-06-06 Nippon Electric Co
JPS5524454A (en) * 1978-08-08 1980-02-21 Nec Corp Insulating gate type field effect transistor
JPS5530876A (en) * 1978-08-28 1980-03-04 Fuji Electric Co Ltd Semiconductor device
JPS5633899A (en) * 1979-08-29 1981-04-04 Cho Lsi Gijutsu Kenkyu Kumiai Method of forming multilayer wire
JPS6337517B2 (en) * 1979-08-29 1988-07-26 Cho Eru Esu Ai Gijutsu Kenkyu Kumiai
JPS56130948A (en) * 1980-03-18 1981-10-14 Nec Corp Semiconductor device
JPS6262468B2 (en) * 1980-03-18 1987-12-26 Nippon Electric Co
JPS5720452A (en) * 1980-07-11 1982-02-02 Matsushita Electric Ind Co Ltd Forming method for multilayer wiring
JPS5748249A (en) * 1980-09-08 1982-03-19 Nec Corp Semiconductor device
JPS57149751A (en) * 1981-03-11 1982-09-16 Nec Corp Semiconductor device
JPS58500680A (en) * 1981-05-04 1983-04-28
JPS57208161A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS57208160A (en) * 1981-06-18 1982-12-21 Fujitsu Ltd Semiconductor device
JPS6037745A (en) * 1983-08-10 1985-02-27 Seiko Epson Corp Semiconductor device
JPS6154648A (en) * 1984-08-24 1986-03-18 Mitsubishi Electric Corp Manufacture of semiconductor device
JPS61152042A (en) * 1984-12-20 1986-07-10 Sgs Microelettronica Spa Metalization pattern of semiconductor element and method thereof
JPS61159750A (en) * 1984-12-31 1986-07-19 Sony Corp Semiconductor device and manufacture thereof
JPS61183942A (en) * 1985-02-08 1986-08-16 Fujitsu Ltd Manufacture of semiconductor device
JPS6260240A (en) * 1985-09-10 1987-03-16 Matsushita Electric Ind Co Ltd Multilayer interconnection
JPS62118546A (en) * 1985-11-19 1987-05-29 Mitsubishi Electric Corp Semiconductor device
JPH0569309B2 (en) * 1985-11-19 1993-09-30 Mitsubishi Electric Corp
JPS63198357A (en) * 1987-02-13 1988-08-17 Nec Corp Semiconductor device
JPS6465856A (en) * 1987-09-05 1989-03-13 Fujitsu Ltd Semiconductor device and manufacture thereof

Also Published As

Publication number Publication date
JPS5742220B2 (en) 1982-09-07

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