JPS53128285A - Semiconductor device and production of the same - Google Patents

Semiconductor device and production of the same

Info

Publication number
JPS53128285A
JPS53128285A JP4325677A JP4325677A JPS53128285A JP S53128285 A JPS53128285 A JP S53128285A JP 4325677 A JP4325677 A JP 4325677A JP 4325677 A JP4325677 A JP 4325677A JP S53128285 A JPS53128285 A JP S53128285A
Authority
JP
Japan
Prior art keywords
production
same
semiconductor device
substrate
single crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4325677A
Other languages
Japanese (ja)
Inventor
Teruo Kusaka
Toru Tsujiide
Yoshiharu Fujimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP4325677A priority Critical patent/JPS53128285A/en
Publication of JPS53128285A publication Critical patent/JPS53128285A/en
Pending legal-status Critical Current

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  • Element Separation (AREA)

Abstract

PURPOSE: To make circuit elements in single crystal Si by thermobonding a substrate having single crystal Si to other substrate through an insulation film.
COPYRIGHT: (C)1978,JPO&Japio
JP4325677A 1977-04-14 1977-04-14 Semiconductor device and production of the same Pending JPS53128285A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4325677A JPS53128285A (en) 1977-04-14 1977-04-14 Semiconductor device and production of the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4325677A JPS53128285A (en) 1977-04-14 1977-04-14 Semiconductor device and production of the same

Publications (1)

Publication Number Publication Date
JPS53128285A true JPS53128285A (en) 1978-11-09

Family

ID=12658772

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4325677A Pending JPS53128285A (en) 1977-04-14 1977-04-14 Semiconductor device and production of the same

Country Status (1)

Country Link
JP (1) JPS53128285A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175833A (en) * 1982-04-08 1983-10-15 Asahi Chem Ind Co Ltd Manufacture of compound semiconductor thin-film structure
JPS61174661A (en) * 1985-01-29 1986-08-06 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device and manufacture thereof
JPS61220456A (en) * 1985-03-27 1986-09-30 Toshiba Corp Manufacture of semiconductor substrate
JPS62105448A (en) * 1985-11-01 1987-05-15 Nec Corp Semiconductor device and manufacture thereof
JPS6477951A (en) * 1987-09-19 1989-03-23 Fujitsu Ltd Semiconductor substrate and manufacture thereof
JPH03129765A (en) * 1989-07-10 1991-06-03 Nippondenso Co Ltd Semiconductor device and manufacture thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58175833A (en) * 1982-04-08 1983-10-15 Asahi Chem Ind Co Ltd Manufacture of compound semiconductor thin-film structure
JPS61174661A (en) * 1985-01-29 1986-08-06 Nippon Telegr & Teleph Corp <Ntt> Semiconductor integrated circuit device and manufacture thereof
JPS61220456A (en) * 1985-03-27 1986-09-30 Toshiba Corp Manufacture of semiconductor substrate
JPH0340512B2 (en) * 1985-03-27 1991-06-19
JPS62105448A (en) * 1985-11-01 1987-05-15 Nec Corp Semiconductor device and manufacture thereof
JPS6477951A (en) * 1987-09-19 1989-03-23 Fujitsu Ltd Semiconductor substrate and manufacture thereof
JPH03129765A (en) * 1989-07-10 1991-06-03 Nippondenso Co Ltd Semiconductor device and manufacture thereof
JPH0824162B2 (en) * 1989-07-10 1996-03-06 日本電装株式会社 Semiconductor device and manufacturing method thereof

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