JPS5378791A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5378791A
JPS5378791A JP15530976A JP15530976A JPS5378791A JP S5378791 A JPS5378791 A JP S5378791A JP 15530976 A JP15530976 A JP 15530976A JP 15530976 A JP15530976 A JP 15530976A JP S5378791 A JPS5378791 A JP S5378791A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
selfmatching
patterned
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15530976A
Other languages
Japanese (ja)
Inventor
Shigeharu Abe
Hideo Tamura
Kenji Sugishima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15530976A priority Critical patent/JPS5378791A/en
Publication of JPS5378791A publication Critical patent/JPS5378791A/en
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

PURPOSE: To form the connecting hole positioned on a wiring layer in a selfmatching way by using a patterned two-layer photo resist.
COPYRIGHT: (C)1978,JPO&Japio
JP15530976A 1976-12-23 1976-12-23 Manufacture of semiconductor device Pending JPS5378791A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15530976A JPS5378791A (en) 1976-12-23 1976-12-23 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15530976A JPS5378791A (en) 1976-12-23 1976-12-23 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5378791A true JPS5378791A (en) 1978-07-12

Family

ID=15603066

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15530976A Pending JPS5378791A (en) 1976-12-23 1976-12-23 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5378791A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6055617A (en) * 1983-09-06 1985-03-30 Hamamatsu Photonics Kk Preparation of semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6055617A (en) * 1983-09-06 1985-03-30 Hamamatsu Photonics Kk Preparation of semiconductor device

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