JPS5378791A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5378791A JPS5378791A JP15530976A JP15530976A JPS5378791A JP S5378791 A JPS5378791 A JP S5378791A JP 15530976 A JP15530976 A JP 15530976A JP 15530976 A JP15530976 A JP 15530976A JP S5378791 A JPS5378791 A JP S5378791A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- semiconductor device
- selfmatching
- patterned
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
PURPOSE: To form the connecting hole positioned on a wiring layer in a selfmatching way by using a patterned two-layer photo resist.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15530976A JPS5378791A (en) | 1976-12-23 | 1976-12-23 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15530976A JPS5378791A (en) | 1976-12-23 | 1976-12-23 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5378791A true JPS5378791A (en) | 1978-07-12 |
Family
ID=15603066
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15530976A Pending JPS5378791A (en) | 1976-12-23 | 1976-12-23 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5378791A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6055617A (en) * | 1983-09-06 | 1985-03-30 | Hamamatsu Photonics Kk | Preparation of semiconductor device |
-
1976
- 1976-12-23 JP JP15530976A patent/JPS5378791A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6055617A (en) * | 1983-09-06 | 1985-03-30 | Hamamatsu Photonics Kk | Preparation of semiconductor device |
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