JPS53117972A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS53117972A
JPS53117972A JP3220077A JP3220077A JPS53117972A JP S53117972 A JPS53117972 A JP S53117972A JP 3220077 A JP3220077 A JP 3220077A JP 3220077 A JP3220077 A JP 3220077A JP S53117972 A JPS53117972 A JP S53117972A
Authority
JP
Japan
Prior art keywords
semiconductor device
film
cvdsi
damaging
prevent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3220077A
Other languages
Japanese (ja)
Inventor
Kosuke Okuyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP3220077A priority Critical patent/JPS53117972A/en
Publication of JPS53117972A publication Critical patent/JPS53117972A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To prevent the damaging of underlying PSG by using a CVDSi3N4 film for the protection film of wiring layers.
COPYRIGHT: (C)1978,JPO&Japio
JP3220077A 1977-03-25 1977-03-25 Semiconductor device Pending JPS53117972A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3220077A JPS53117972A (en) 1977-03-25 1977-03-25 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3220077A JPS53117972A (en) 1977-03-25 1977-03-25 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS53117972A true JPS53117972A (en) 1978-10-14

Family

ID=12352257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3220077A Pending JPS53117972A (en) 1977-03-25 1977-03-25 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS53117972A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586165A (en) * 1978-12-25 1980-06-28 Hitachi Ltd Semiconductor strain transducer
US5057453A (en) * 1987-10-21 1991-10-15 Kabushiki Kaisha Toshiba Method for making a semiconductor bump electrode with a skirt

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5586165A (en) * 1978-12-25 1980-06-28 Hitachi Ltd Semiconductor strain transducer
JPS6222470B2 (en) * 1978-12-25 1987-05-18 Hitachi Ltd
US5057453A (en) * 1987-10-21 1991-10-15 Kabushiki Kaisha Toshiba Method for making a semiconductor bump electrode with a skirt

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