JPS5273678A - Semiconductor device and its production - Google Patents
Semiconductor device and its productionInfo
- Publication number
- JPS5273678A JPS5273678A JP14952275A JP14952275A JPS5273678A JP S5273678 A JPS5273678 A JP S5273678A JP 14952275 A JP14952275 A JP 14952275A JP 14952275 A JP14952275 A JP 14952275A JP S5273678 A JPS5273678 A JP S5273678A
- Authority
- JP
- Japan
- Prior art keywords
- production
- semiconductor device
- film
- highly reliable
- protecting film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Abstract
PURPOSE: To obtain a highly reliable protecting film by using a Ta film.
COPYRIGHT: (C)1977,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14952275A JPS5273678A (en) | 1975-12-17 | 1975-12-17 | Semiconductor device and its production |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14952275A JPS5273678A (en) | 1975-12-17 | 1975-12-17 | Semiconductor device and its production |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5273678A true JPS5273678A (en) | 1977-06-20 |
Family
ID=15476966
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14952275A Pending JPS5273678A (en) | 1975-12-17 | 1975-12-17 | Semiconductor device and its production |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5273678A (en) |
-
1975
- 1975-12-17 JP JP14952275A patent/JPS5273678A/en active Pending
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