JPS5436182A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5436182A
JPS5436182A JP10290577A JP10290577A JPS5436182A JP S5436182 A JPS5436182 A JP S5436182A JP 10290577 A JP10290577 A JP 10290577A JP 10290577 A JP10290577 A JP 10290577A JP S5436182 A JPS5436182 A JP S5436182A
Authority
JP
Japan
Prior art keywords
manufacture
semiconductor device
film
psg
cracks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10290577A
Other languages
Japanese (ja)
Inventor
Shinobu Fukunaga
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10290577A priority Critical patent/JPS5436182A/en
Publication of JPS5436182A publication Critical patent/JPS5436182A/en
Pending legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)

Abstract

PURPOSE: To avoid the occurrence in cracks for PSG film, by providing the SiO2 film between the Al2O3 substrate or film and PSG film.
COPYRIGHT: (C)1979,JPO&Japio
JP10290577A 1977-08-26 1977-08-26 Manufacture for semiconductor device Pending JPS5436182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10290577A JPS5436182A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10290577A JPS5436182A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Publications (1)

Publication Number Publication Date
JPS5436182A true JPS5436182A (en) 1979-03-16

Family

ID=14339865

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10290577A Pending JPS5436182A (en) 1977-08-26 1977-08-26 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5436182A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6087014A (en) * 1983-09-14 1985-05-16 フアーレル　コーポレーシヨン Rotary-processor
JPS6087013A (en) * 1983-09-14 1985-05-16 フア−レル　コ−ポレ−シヨン Method and device for treating liquid material containing volatile component
JPS6090717A (en) * 1983-09-14 1985-05-21 フアーレル　コーポレーシヨン Rotary-processor

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6087014A (en) * 1983-09-14 1985-05-16 フアーレル　コーポレーシヨン Rotary-processor
JPS6087013A (en) * 1983-09-14 1985-05-16 フア−レル　コ−ポレ−シヨン Method and device for treating liquid material containing volatile component
JPS6090717A (en) * 1983-09-14 1985-05-21 フアーレル　コーポレーシヨン Rotary-processor
JPH0534124B2 (en) * 1983-09-14 1993-05-21 Farrel Corp
JPH0534125B2 (en) * 1983-09-14 1993-05-21 Farrel Corp

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