JPS52153676A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS52153676A
JPS52153676A JP6971676A JP6971676A JPS52153676A JP S52153676 A JPS52153676 A JP S52153676A JP 6971676 A JP6971676 A JP 6971676A JP 6971676 A JP6971676 A JP 6971676A JP S52153676 A JPS52153676 A JP S52153676A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
face
etching
sio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6971676A
Other languages
Japanese (ja)
Inventor
Yoshihisa Mizutani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP6971676A priority Critical patent/JPS52153676A/en
Publication of JPS52153676A publication Critical patent/JPS52153676A/en
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)

Abstract

PURPOSE: To prevent undesired etching on Si face by etching Si3N4 after covering the face of Si and poly-Si with SiO2.
COPYRIGHT: (C)1977,JPO&Japio
JP6971676A 1976-06-16 1976-06-16 Production of semiconductor device Pending JPS52153676A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6971676A JPS52153676A (en) 1976-06-16 1976-06-16 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6971676A JPS52153676A (en) 1976-06-16 1976-06-16 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS52153676A true JPS52153676A (en) 1977-12-20

Family

ID=13410825

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6971676A Pending JPS52153676A (en) 1976-06-16 1976-06-16 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS52153676A (en)

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